Etec Systems, Inc.

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Beaverton, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Magnification correction for small field scanning
- Patent number 5,781,346
- Issue date Jul 14, 1998
- Etec System, Inc.
- Paul C. Allen
- G02 - OPTICS
Information Patent Grant
Scanning lithography system haing double pass Wynne-Dyson optics
- Patent number 5,757,469
- Issue date May 26, 1998
- Etec Systems, Inc.
- Paul C. Allen
- G02 - OPTICS
Information Patent Grant
Rasterizer for a pattern generation apparatus
- Patent number 5,533,170
- Issue date Jul 2, 1996
- Etec Systems, Inc.
- Robin L. Teitzel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser pattern generation apparatus
- Patent number 5,386,221
- Issue date Jan 31, 1995
- Etec Systems, Inc.
- Paul C. Allen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Scanning laser lithography system alignment apparatus
- Patent number 5,327,338
- Issue date Jul 5, 1994
- Etec Systems, Inc.
- Paul Allen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Small field scanner
- Patent number 5,255,051
- Issue date Oct 19, 1993
- Etec Systems, Inc.
- Paul C. Allen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Small field scanner
- Patent number 5,227,839
- Issue date Jul 13, 1993
- Etec Systems, Inc.
- Paul C. Allen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

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