Number | Date | Country | Kind |
---|---|---|---|
8802333 | Feb 1988 | GBX |
Number | Name | Date | Kind |
---|---|---|---|
3715482 | Haines et al. | Feb 1973 | |
4416540 | Nicholson | Nov 1983 | |
4715670 | Turukhano | Dec 1987 | |
4857425 | Phillips | Aug 1989 |
Entry |
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"Submicrometer Holographic Photolithography" by John Brook and Rene Dandliker--Solid State Technology--Nov. '89. |