Claims
- 1. A manufacturing method for a liquid crystal display, said method comprising:
forming a photosensitive resin film on a substrate; exposing the photosensitive resin film with a first amount of light via a first mask; exposing the photosensitive resin film with a second amount of light via a second mask; developing the photosensitive resin film subjected to two exposures thereby forming two types of concaves having different depths; and forming an electrical conductive film on the photosensitive resin film developed to have two types of concaves.
- 2. A manufacturing method according to claim 1, further comprising forming a thin film transistor on the substrate so that the photosensitive resin film is formed thereon,
wherein
the photosensitive resin film constitutes an insulating film, the electrically conductive film is a pixel electrode having a size corresponding to a pixel, and the pixel electrode is electrically connected to the thin film transistor.
- 3. A manufacturing method according to claim 2, wherein
the first amount of light is larger than the second amount of light,
the concave formed using the first mask is a hole piercing through the photosensitive resin film, constituting a contact hole for electrically connecting the pixel electrode and the thin film transistor, and the concave formed using the second mask constitutes a concave formed on a surface of the pixel electrode.
- 4. A manufacturing method according to claim 2, wherein
the second amount of light is larger than the first amount of light, the concave formed using the first mask constitutes a concave formed on a surface of the pixel electrode, and the concave formed using the second mask is a hole piercing through the photosensitive resin film, constituting a contact hole for electrically connecting the pixel electrode and the thin film transistor.
- 5. A manufacturing method according to claim 1, further comprising
heating the photo sensitive resin to give edges of the concave a gentler slope.
- 6. A manufacturing method for a liquid crystal display, said method comprising:
forming a photosensitive resin film on a substrate; exposing the photosensitive resin film with a first amount of light via a first mask; exposing the photosensitive resin film with a second amount of light via a second mask; developing the photosensitive resin film by subjecting it to two exposures, thereby forming a hole piercing the photosensitive resin film and a concave not piercing the photosensitive resin film; and forming an electrical conductive film on the photosensitive resin film having two kinds of convexes and being developed, such that the hole piercing is used as a contact hole and a sloping surface of the concave is used as an alignment control portion.
- 7. A method according to claim 6, wherein
the concave is formed substantially over the entire surface of the pixel, leaving the rest of the surface convex.
Priority Claims (4)
Number |
Date |
Country |
Kind |
HEI 10-337840 |
Nov 1998 |
JP |
|
HEI 10-340500 |
Nov 1998 |
JP |
|
HEI 11-305804 |
Oct 1999 |
JP |
|
HEI 11-200600 |
Jul 1999 |
JP |
|
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation in part application of U.S. patent applications Ser. No. 09/615,608, filed on Jul. 14, 2000, and Ser. No. 09/447,378, filed on Nov. 23, 1999, both of which are incorporated herein in their entirety.
Continuation in Parts (2)
|
Number |
Date |
Country |
Parent |
09615608 |
Jul 2000 |
US |
Child |
09975860 |
Oct 2001 |
US |
Parent |
09447378 |
Nov 1999 |
US |
Child |
09615608 |
Jul 2000 |
US |