Number | Name | Date | Kind |
---|---|---|---|
4580900 | Larsen | Apr 1986 | |
4615621 | Allen et al. | Oct 1986 | |
5783340 | Farino et al. | Jul 1998 |
Entry |
---|
Tseng et al., “Investigation of best focus shift issues from focusing system of ASML PAS-5000/50 steppers”, Taiwan Semiconductor Manufacturing Company, Hsin-Chu, Taiwan, R.O.C., pp. 1-8. |