Number | Name | Date | Kind |
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5318868 | Hasegawa et al. | Jun 1994 | |
5468578 | Rolfson | Nov 1995 |
Entry |
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"Phase-Shifting Mask Strategies: Isolated Dark Lines" by Marc D. Levenson, Microlithography World, Mar. 1992, pp. 6-12. |
"Phase-Shifting Mask Strategies: Line-Space Pattern" by Marc D. Levenson Microlithography World, Sep 1992, pp. 6-12. |