Claims
- 1. A MEMS device comprising:
a) a substrate; b) one or more movable elements coupled to the substrate for movement with respect to the substrate; and c) means for acoustic pulse actuation of at least one of the one or more movable elements.
- 2. The device of claim 1 wherein the means for acoustic pulse actuation delivers an acoustic pulse to the one or more movable elements through one or more holes in a backside of the substrate.
- 3. The device of claim 1 wherein the means for acoustic pulse actuation delivers an acoustic pulse to a chamber below the substrate.
- 4. The device of claim 1, wherein the one or more movable elements are disposed in a liquid environment and the means for acoustic pulse actuation is in contact with the liquid environment, whereby the means for acoustic pulse actuation delivers the acoustic pulse to at least one of the movable elements through the liquid environment.
- 5. The device of claim 1 wherein the means for acoustic pulse actuation includes one or more MEMS pneumatic control valves.
- 6. The device of claim 1 wherein the means for acoustic pulse actuation includes a membrane inductively coupled to an electromagnet.
- 7. A MEMS optical switch, comprising:
a) a substrate; b) one or more rotatable mirrors coupled for rotation with respect to the substrate; and c) means for acoustic pulse actuation of the rotatable mirrors.
- 8. The optical switch of claim 7 wherein the means for acoustic pulse actuation delivers an acoustic pulse to the one or more movable elements through one or more holes in a backside of the substrate.
- 9. The optical switch of claim 7 wherein the means for acoustic pulse actuation delivers an acoustic pulse to a chamber below the substrate.
- 10. The optical switch of claim 7, wherein the one or more movable elements are disposed in a liquid environment and the means for acoustic pulse actuation is in contact with the liquid environment, whereby the means for acoustic pulse actuation delivers the acoustic pulse to at least one of the movable elements through the liquid environment.
- 11. The optical switch of claim 7 wherein the means for acoustic pulse actuation includes one or more MEMS pneumatic control valves.
- 12. The optical switch of claim 7 wherein the means for acoustic pulse actuation includes a membrane inductively coupled to an electromagnet.
CROSS-REFERENCE TO A RELATED APPLICATION
[0001] This application is based on and claims priority from Provisional application 60/255,733 filed Dec. 14, 2000, the entire disclosure of which is incorporated herein by reference.
Provisional Applications (1)
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Number |
Date |
Country |
|
60255733 |
Dec 2000 |
US |