Structures for transforming mechanical energy

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B81B3/0027

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0027Structures for transforming mechanical energy

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS actuator element and MEMS actuator array with a plurality of M...
- Patent number 11,987,491
- Issue date May 21, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Peter Dürr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-opto-mechanical system sensor, arrangement and manufacturing...
- Patent number 11,898,899
- Issue date Feb 13, 2024
- MIRAEX SA
- Mitchell Anderson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor sampling with combined sense axes
- Patent number 11,726,107
- Issue date Aug 15, 2023
- NXP USA, INC.
- Andrew C McNeil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-tunable optical ring resonator
- Patent number 11,722,120
- Issue date Aug 8, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Michael Wood
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device including a stop spring structure
- Patent number 11,697,583
- Issue date Jul 11, 2023
- Robert Bosch GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bone-conduction sensor assembly
- Patent number 11,697,587
- Issue date Jul 11, 2023
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Tingting Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pseudo-extensional mode MEMS ring gyroscope
- Patent number 11,656,077
- Issue date May 23, 2023
- Analog Devices, Inc.
- Igor P. Prikhodko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing three-dimensionally structured member, met...
- Patent number 11,584,641
- Issue date Feb 21, 2023
- TOKYO KEIKl INC.
- Kazuaki Tani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer for interacting with a volume flow of a fluid, and...
- Patent number 11,554,950
- Issue date Jan 17, 2023
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Harald Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Seismic acquisition system and sensor based on MEMS sensor with low...
- Patent number 11,472,696
- Issue date Oct 18, 2022
- INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
- Zongwei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices
- Patent number 11,470,426
- Issue date Oct 11, 2022
- Infineon Technologies AG
- Arnaud Walther
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaged pressure sensor device
- Patent number 11,427,464
- Issue date Aug 30, 2022
- NXP USA, INC.
- Weng Foong Yap
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Eight spring dual substrate MEMS plate switch and method of manufac...
- Patent number 11,305,982
- Issue date Apr 19, 2022
- Innovative Micro Technology
- Christopher S. Gudeman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 11,259,105
- Issue date Feb 22, 2022
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone assembly with back volume vent
- Patent number 11,122,360
- Issue date Sep 14, 2021
- Knowles Electronics, LLC
- Michael Pedersen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a monocrystalline substrate and micromechanic...
- Patent number 11,046,577
- Issue date Jun 29, 2021
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite sensor package
- Patent number 11,041,744
- Issue date Jun 22, 2021
- LG Innotek Co., Ltd
- Jeong Gi Seo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaged pressure sensor device
- Patent number 10,822,224
- Issue date Nov 3, 2020
- NXP USA, INC.
- Weng Foong Yap
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator, system having a plurality of MEMS actuators, and met...
- Patent number 10,807,859
- Issue date Oct 20, 2020
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,766,764
- Issue date Sep 8, 2020
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensors, methods for providing same and method for operating a...
- Patent number 10,737,935
- Issue date Aug 11, 2020
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Non-electrical battery based on plastic strings and membranes
- Patent number 10,720,611
- Issue date Jul 21, 2020
- Physical Optics Corporation
- Andrew Kostrzewski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) apparatus with adjustable spring
- Patent number 10,703,625
- Issue date Jul 7, 2020
- Industrial Technology Research Institute
- Chien-Nan Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a monocrystalline substrate and micromechanic...
- Patent number 10,611,630
- Issue date Apr 7, 2020
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Liquid-resistant packaging for electro-acoustic transducers and ele...
- Patent number 10,587,942
- Issue date Mar 10, 2020
- Apple Inc.
- Anthony D. Minervini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,421,659
- Issue date Sep 24, 2019
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and process
- Patent number 10,375,483
- Issue date Aug 6, 2019
- Cirrus Logic, Inc.
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system microphone
- Patent number 10,315,912
- Issue date Jun 11, 2019
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acoustic tweezers
- Patent number 10,106,397
- Issue date Oct 23, 2018
- University of Southern California
- Eun Sok Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical transducer having an optimized non-flat su...
- Patent number 10,029,912
- Issue date Jul 24, 2018
- Kolo Technologies, Inc.
- Yongli Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVI...
- Publication number 20240425354
- Publication date Dec 26, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
- Publication number 20240327198
- Publication date Oct 3, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...
- Publication number 20240253977
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Device for Generating Sound Pressure
- Publication number 20240228263
- Publication date Jul 11, 2024
- ROBERT BOSCH GmbH
- Markus Klemm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Device for Generating Sound Pressure
- Publication number 20240132339
- Publication date Apr 25, 2024
- ROBERT BOSCH GmbH
- Markus Klemm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR WITH TWO COMPLIANCES
- Publication number 20230319484
- Publication date Oct 5, 2023
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE FOR ENHANCED ACCELERATION MEASUREMENT
- Publication number 20230266357
- Publication date Aug 24, 2023
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTOELECTRONIC COMPONENT COMPRISING, ON A SINGLE SUBSTRATE, AN OPTI...
- Publication number 20230019436
- Publication date Jan 19, 2023
- THALES
- François DUPORT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bone-conduction Sensor Assembly
- Publication number 20220402753
- Publication date Dec 22, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Tingting Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
- Publication number 20220326353
- Publication date Oct 13, 2022
- Beijing Voyager Technology Co., Ltd.
- Sergio Fabien Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR ELEMENT
- Publication number 20220144623
- Publication date May 12, 2022
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR ELEMENT AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF M...
- Publication number 20220119243
- Publication date Apr 21, 2022
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Peter DÜRR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL Z-INERTIAL SENSOR
- Publication number 20220120781
- Publication date Apr 21, 2022
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRON-RESOLUTION SOFT STRETCHABLE STRAIN AND PRESSURE SENSOR
- Publication number 20220009764
- Publication date Jan 13, 2022
- The Regents of the University of California
- Yongxiao Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE INCLUDING A STOP SPRING STRUCTURE
- Publication number 20210323809
- Publication date Oct 21, 2021
- ROBERT BOSCH GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing Three-Dimensionally Structured Member, Met...
- Publication number 20210278433
- Publication date Sep 9, 2021
- TOKYO KEIKI INC.
- Kazuaki TANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-OPTO-MECHANICAL SYSTEM SENSOR, ARRANGEMENT AND MANUFACTURING...
- Publication number 20210255031
- Publication date Aug 19, 2021
- MIRAEX SA
- Mitchell ANDERSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC RING GYROSCOPE
- Publication number 20210247186
- Publication date Aug 12, 2021
- MURATA MANUFACTURING CO., LTD.
- Heikki KUISMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20210147223
- Publication date May 20, 2021
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Roman Forke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVIN...
- Publication number 20210139316
- Publication date May 13, 2021
- Innovative Interface Laboratory Corp.
- Yu-Wen Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR SAMPLING WITH COMBINED SENSE AXES
- Publication number 20210123946
- Publication date Apr 29, 2021
- NXP USA, Inc.
- Andrew C McNeil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES
- Publication number 20210044905
- Publication date Feb 11, 2021
- INFINEON TECHNOLOGIES AG
- Arnaud Walther
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EIGHT SPRING DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFAC...
- Publication number 20210017017
- Publication date Jan 21, 2021
- Innovative Micro Technology
- Christopher S. GUDEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGED PRESSURE SENSOR DEVICE
- Publication number 20210009405
- Publication date Jan 14, 2021
- NXP USA, Inc.
- Weng Foong YAP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE SENSOR PACKAGE
- Publication number 20200300676
- Publication date Sep 24, 2020
- LG Innotek Co., Ltd.
- Jeong Gi SEO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PSEUDO-EXTENSIONAL MODE MEMS RING GYROSCOPE
- Publication number 20200249020
- Publication date Aug 6, 2020
- Analog Devices, Inc.
- Igor P. Prikhodko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROPHONE ASSEMBLY WITH BACK VOLUME VENT
- Publication number 20200252716
- Publication date Aug 6, 2020
- KNOWLES ELECTRONICS, LLC
- Michael Pedersen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...
- Publication number 20200198963
- Publication date Jun 25, 2020
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIQUID-RESISTANT PACKAGING FOR ELECTRO-ACOUSTIC TRANSDUCERS AND ELE...
- Publication number 20200107096
- Publication date Apr 2, 2020
- Apple Inc.
- Anthony D. Minervini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Transducer for Interacting with a Volume Flow of a Fluid, and...
- Publication number 20200087138
- Publication date Mar 19, 2020
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Harald SCHENK
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Structures for transforming mechanical energy

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS actuator element and MEMS actuator array with a plurality of M...

Micro-opto-mechanical system sensor, arrangement and manufacturing...

Inertial sensor sampling with combined sense axes

MEMS-tunable optical ring resonator

Micromechanical device including a stop spring structure

Bone-conduction sensor assembly

Pseudo-extensional mode MEMS ring gyroscope

Method for manufacturing three-dimensionally structured member, met...

MEMS transducer for interacting with a volume flow of a fluid, and...

Seismic acquisition system and sensor based on MEMS sensor with low...

MEMS devices

Packaged pressure sensor device

Eight spring dual substrate MEMS plate switch and method of manufac...

MEMS microphone and method of manufacturing the same

Microphone assembly with back volume vent

Method for processing a monocrystalline substrate and micromechanic...

Composite sensor package

Packaged pressure sensor device

MEMS actuator, system having a plurality of MEMS actuators, and met...

MEMS sensor compensation for off-axis movement

MEMS sensors, methods for providing same and method for operating a...

Non-electrical battery based on plastic strings and membranes

Microelectromechanical system (MEMS) apparatus with adjustable spring

Method for processing a monocrystalline substrate and micromechanic...

Liquid-resistant packaging for electro-acoustic transducers and ele...

MEMS sensor compensation for off-axis movement

MEMS device and process

Microelectromechanical system microphone

Acoustic tweezers

Micro-electro-mechanical transducer having an optimized non-flat su...

Patents Applicationslast 30 patents

DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVI...

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...

Microelectromechanical Device for Generating Sound Pressure

Microelectromechanical Device for Generating Sound Pressure

MEMS SENSOR WITH TWO COMPLIANCES

MICROMECHANICAL DEVICE FOR ENHANCED ACCELERATION MEASUREMENT

OPTOELECTRONIC COMPONENT COMPRISING, ON A SINGLE SUBSTRATE, AN OPTI...

Bone-conduction Sensor Assembly

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MICROMECHANICAL SENSOR ELEMENT

MEMS ACTUATOR ELEMENT AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF M...

MICROMECHANICAL Z-INERTIAL SENSOR

MICRON-RESOLUTION SOFT STRETCHABLE STRAIN AND PRESSURE SENSOR

MICROMECHANICAL DEVICE INCLUDING A STOP SPRING STRUCTURE

Method for Manufacturing Three-Dimensionally Structured Member, Met...

MICRO-OPTO-MECHANICAL SYSTEM SENSOR, ARRANGEMENT AND MANUFACTURING...

PIEZOELECTRIC RING GYROSCOPE

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVIN...

INERTIAL SENSOR SAMPLING WITH COMBINED SENSE AXES

MEMS DEVICES

EIGHT SPRING DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFAC...

PACKAGED PRESSURE SENSOR DEVICE

COMPOSITE SENSOR PACKAGE

PSEUDO-EXTENSIONAL MODE MEMS RING GYROSCOPE

MICROPHONE ASSEMBLY WITH BACK VOLUME VENT

METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...

LIQUID-RESISTANT PACKAGING FOR ELECTRO-ACOUSTIC TRANSDUCERS AND ELE...

MEMS Transducer for Interacting with a Volume Flow of a Fluid, and...