Number | Name | Date | Kind |
---|---|---|---|
3784471 | Kaiser | Jan 1974 | |
3904430 | Tipping et al. | Sep 1975 | |
3957531 | Tipping et al. | May 1976 | |
4091826 | Bahrke | May 1978 | |
4156619 | Griesshamner | May 1979 | |
4269630 | Stephenson et al. | May 1981 |
Number | Date | Country |
---|---|---|
2541613 | Mar 1977 | DEX |
53-132173 | Nov 1978 | JPX |
56-28684 | Mar 1981 | JPX |
1399867 | Jul 1975 | GBX |
Entry |
---|
Particle Contamination and Device Performance, Duffalo et al., Solid State Tech., Mar. 1984, pp. 109-114. |
Chemical Technology of Microelectronics, Larrobee, Chem. Tech., Mar. 1985, pp. 168-174. |