This application is a continuation-in-part claiming priority under 35 USC §120 from U.S. patent application Ser. No. 09/412,837 filed Oct. 5, 1999 now U.S. Pat. No. 6,315,883, now naming Mayer et al. as inventors, and titled “Electroplanarization of Large and Small Damascene Features Using Diffusion Barriers and Electropolishing,” which claims priority under 35 USC §119(e) from provisional patent application No. 60/105,700 filed Oct. 26, 1998. Both of these applications are incorporated herein by reference in their entireties for all purposes.
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Number | Date | Country | |
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60/105700 | Oct 1998 | US |
Number | Date | Country | |
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Parent | 09/412837 | Oct 1999 | US |
Child | 09/967075 | US |