Number | Date | Country | Kind |
---|---|---|---|
44 14 391.5 | Apr 1994 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4890245 | Yomoto et al. | Dec 1989 | |
4919542 | Nulman et al. | Apr 1990 | |
4956538 | Moslehi | Sep 1990 | |
4989991 | Pecot et al. | Feb 1991 | |
5114242 | Gat et al. | May 1992 | |
5188458 | Thompson et al. | Feb 1993 | |
5226732 | Nakos et al. | Jul 1993 | |
5305416 | Fiory | Apr 1994 | |
5308161 | Stein | May 1994 | |
5388909 | Johnston et al. | Feb 1995 | |
5436172 | Moslehi | Jul 1995 |
Number | Date | Country |
---|---|---|
WO9012295 | Oct 1990 | WOX |
WO9212405 | Jul 1992 | WOX |
WO9400744 | Jan 1994 | WOX |
Entry |
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K. L. Knutson et al., Modeling of 3-dimensional effects on temperature uniformity in RTP of 8" wafers., IEEE Trans. On Semiconductor Manufacturing 7, 68, (1994). |