TREA

of wafers or semiconductor substrates

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Industry

  • CPC
  • G01J5/0007
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Parent Industries

GPHYSICS G01Measuring instruments G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT COLORIMETRY RADIATION PYROMETRY G01J5/00Radiation pyrometry

Current Industry

G01J5/0007of wafers or semiconductor substrates
Industries