This application claims the priority benefit of China application serial no. 202310589272.9, filed on May 24, 2023. The entirety of the above-mentioned patent application is hereby incorporated by reference herein and made a part of this specification.
The present disclosure relates to the technical field of optical measurement, in particular to a method and a device for extracting overlapping peaks based on mode decomposition.
A spectral confocal displacement sensor emits a beam of high-density and wide-spectrum light through a color laser light source, and forms white light with different wavelengths in the measuring range after passing through a dispersive lens. Each wavelength corresponds to a distance value. The measuring light is reflected from the object surface, and only the light meeting a confocal condition can be sensed by the spectrometer through a small hole. By calculating the wavelength of the focus of the sensed light, the obtained distance value is converted. Because of its high precision and non-contact, the sensor is widely used to measure the thickness of a glass substrate. In the process of measuring the thickness of the glass substrate, it is very important to accurately extract peak values of spectral axial response signals (sARS).
At present, there are many peak location technologies for sARS, such as a classic centroid method and a model-based fitting algorithm: a Gaussian fitting algorithm (GFA) and a Binomial fitting algorithm (BFA). However, these techniques all extract a peak value of a single spectral axial response signal (sARS). When the measured object is a glass substrate, white light is reflected from the upper surface of the glass once and from the lower surface of the glass once again, and two spectral axial response signals (sARS) are obtained. When the glass substrate is thick, the two spectral axial response signals (sARS) are distributed independently of each other, as shown in
A brief summary of embodiments of the present disclosure is given hereinafter in order to provide a basic understanding of some aspects of the present disclosure. It should be understood that the following summary is not an exhaustive summary of the present disclosure, and is not to identify key or important parts of the present disclosure or to limit the scope of the present disclosure. The purpose is only to present some concepts in a simplified form as a prelude to the more detailed description to be discussed later.
In order to solve the above technical problems, the present disclosure provides a method for extracting overlapping peaks based on mode decomposition. The method uses the mode decomposition technology to decompose two spectral axial response signals (sARS) from the original light intensity, and iteratively finds the peak values of the two spectral axial response signals (sARS) to improve the accuracy of finding the peaks.
Specifically, according to one aspect of the application, a method for extracting overlapping peaks based on mode decomposition is provided, which is used to extract peaks of two spectral axial response signals (sARS) in a process of measuring the thickness of a glass substrate, wherein the method includes:
Further, the method for extracting overlapping peaks based on mode decomposition specifically includes:
In order to improve the accuracy of finding peaks, the present disclosure innovatively uses the “between-class variance function” in the field of image processing to represent finding peak values, and in the process of finding peak values, the quadratic penalty term and the Lagrange multiplier are used at the same time so that the problem formula is unconstrained (Step 2). The quadratic penalty term is a classic method to encourage the fidelity of reconstruction, and the Lagrange multiplier is a common method to strictly enforce constraints. The quadratic penalty has good convergence under a limited weight, and the Lagrange multiplier strictly enforces constraints, so that the combination of the quadratic penalty term and the Lagrange multiplier in Step 2 achieves better results. In addition, in the actual solution, the solution of the minimization problem formula in Step 3 is more difficult. The inventor devoted himself to studying the algorithm of the minimization problem formula before finally obtaining the solution in Step 4.
Preferably, the Step 1 further includes the following process before obtaining the problem formula for finding peak values according to the between-class variance function representation:
Further, the Step 1 further includes the following process before obtaining the problem formula for finding peak values according to the between-class variance function representation:
According to another aspect of the application, a device for extracting overlapping peaks based on mode decomposition is further provided, wherein the method for extracting overlapping peaks based on mode decomposition described above is executed, and the device includes: a problem formula obtaining module for finding peak values, which is configured to obtain
Aiming at the above defects or improvement requirements of the prior art, the present disclosure provides an adaptive mode decomposition method, which can separate a plurality of peaks when they have overlapping areas, and accurately extract peak wavelengths, thus solving the problem that it is difficult to extract overlapping peaks in measuring transparent thin plates. In the field of image processing, the maximum between-class variance method can perform threshold segmentation well on the image with a bimodal histogram, wherein the between-class variance represents the dispersion degree of data on both sides of the threshold. The greater the between-class variance, the greater the difference between the foreground and the background, and the better the binarization effect. Therefore, the present disclosure introduces the maximum between-class variance method to find the peak values of the overlapping area. In addition, through mode decomposition and iteratively finding peak values, two peak wavelengths when measuring thin glass can be extracted more accurately. Therefore, the mode decomposition method of the present disclosure shows the advantage of accuracy, and especially when a plurality of peaks have overlapping areas, the method has stronger accuracy of finding peak values.
The present disclosure can be better understood with reference to the following description given in conjunction with the accompanying drawings, in which the same or similar reference numerals are used to indicate the same or similar parts throughout the accompanying drawings. The accompanying drawings, together with the detailed description hereinafter, are included in and form a part of this specification, and serve to further illustrate preferred embodiments of the present disclosure and explain the principles and advantages of the present disclosure. In the accompanying drawings:
Embodiments of the present disclosure will be described hereinafter with reference to the accompanying drawings. Elements and features described in one drawing or one embodiment of the present disclosure may be combined with elements and features shown in one or more other drawings or embodiments. It should be noted that for the sake of clarity, representations and descriptions of components and processes that are not related to the present disclosure and are known to those skilled in the art are omitted from the accompanying drawings and descriptions.
At present, most technical schemes are as follows: using a linear fitting algorithm (such as a centroid method) or a nonlinear fitting algorithm (such as Gaussian fitting and quadratic polynomial function fitting) to extract two peak values of overlapping peaks, respectively. When the transparent thin plate is thin, two sub-reflection intensity distributions are no longer independent of each other. Using a separate peak value finding algorithm, it is impossible to avoid the mutual interference of the two sub-reflection intensities, so that it is less accurate to find peak values. In the present disclosure, the mode decomposition technology is used to decompose two spectral axial response signals (sARS) from the original light intensity, and the peak values of the two spectral axial response signals (sARS) are iteratively solved, so that the accuracy of finding peak values is improved.
The method for extracting overlapping peaks based on mode decomposition can separate a plurality of peaks when they have overlapping areas, and accurately extract peak wavelengths, thus solving the problem that it is difficult to extract overlapping peaks in measuring transparent thin plates. The method shows the advantage of accuracy, especially when a plurality of peaks have overlapping areas.
Specifically, referring to the flowchart of
STEP1: a spectral confocal signal of a spectral confocal displacement sensor is acquired, a dark current deduction process is performed, and then a light intensity is normalized (the light intensity data is mapped between 0 and 1) to obtain an original light intensity sequence
STEP2: sliding fitting is performed on an original light intensity sequence by using a least square method, and a convolution coefficient is obtained. Convolution calculation of the original light intensity sequence
STEP3: in the field of image processing, the maximum between-class variance method can perform threshold segmentation well on the image with a bimodal histogram, wherein the between-class variance represents the dispersion degree of data on both sides of the threshold. The greater the between-class variance, the greater the difference between the foreground and the background, and the better the binarization effect. The present disclosure introduces the maximum between-class variance method to find the peak values of the overlapping area. According to the between-class variance function representation, the problem formula for finding peak values is expressed as:
STEP4: At this point, the formula is transformed into an optimization problem formula containing constraint, a penalty term and a Lagrange multiplier γ(λ) about λ are added to the problem formula by using an augmented Lagrange multiplier method, and the optimization problem formula containing two variables and one constraint condition is transformed into an unconstrained extreme value problem containing three variables:
STEP5: in order to avoid strict convex assumption of the formula and increase robustness of the iterative process, the unconstrained extreme value problem is transformed into an equivalent minimization problem formula as following:
STEP6: the solution of the minimization problem formula is:
STEP7: the peak wavelength λi is updated by using a centroid algorithm, and of course, other nonlinear algorithms can also be used to update the peak wavelength λi:
STEP8: the Lagrange multiplier γ(λ) is updated according to the following formula:
STEP9: a convergence condition is set:
STEP10: up to now, the peak value finding formula is obtained in STEP5, formulas for updating three variables are obtained in STEP6, STEP7 and STEP8, and the convergence condition are obtained in STEP9. Repeat STEP6, STEP7 and STEP8 to update the mode si, the peak wavelength λi and the Lagrange multiplier γ(λ), and stop iteration until the convergence condition in STEP9 is met. Final calculation results of λ1 and λ2 are the peak values of two spectral axial response signals (SARS) when stopping iteration.
In the above process, the centroid method or the Gaussian fitting method can also be used to find the peak values of the two spectral axial response signals (sARS), respectively.
According to the above scheme of the present disclosure, the maximum between-class variance function is used in STEP3 to express the representation formula for solving the peak value, and the augmented Lagrange multiplier method is used in STEP4 to find the representation formula of the peak value. The updating formulas of three parameters (the mode si, the peak wavelength λi; and the Lagrange multiplier γ(λ)) are designed in STEP6, STEP7 and STEP8, respectively. Combined with the setting formula of the convergence condition in STEP9, the peak values of two spectral axial response signals (sARS) are finally obtained.
As shown in
An embodiment of the present disclosure further provides a device for extracting overlapping peaks based on mode decomposition, wherein the method for extracting overlapping peaks based on mode decomposition described above is executed, and the device includes:
In addition, the method of the present disclosure is not limited to being executed in the time sequence described in the specification, but can also be executed in other time sequences, in parallel or independently. Therefore, the execution order of the method described in this specification does not limit the technical scope of the present disclosure.
Although the present disclosure has been disclosed by describing specific embodiments thereof, it should be understood that all the above embodiments and examples are illustrative and not restrictive. Those skilled in the art can design various modifications, improvements or equivalents to the present disclosure within the spirit and scope of the appended claims. These modifications, improvements or equivalents should also be considered as included in the protection scope of the present disclosure.
Number | Date | Country | Kind |
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202310589272.9 | May 2023 | CN | national |