Number | Name | Date | Kind |
---|---|---|---|
5173437 | Chi | Dec 1992 | |
5518950 | Ibok et al. | May 1996 | |
5571746 | Pan | Nov 1996 | |
5631188 | Chang et al. | May 1997 | |
5670410 | Pan | Sep 1997 | |
5891771 | Wu et al. | Apr 1999 | |
5973346 | Pan | Oct 1999 | |
6022781 | Noble, Jr. et al. | Feb 2000 | |
6087214 | Cunningham | Jul 2000 | |
6103592 | Levy et al. | Aug 2000 |
Number | Date | Country |
---|---|---|
0814499 | Jun 1997 | EP |
0844660 | Nov 1997 | EP |
0966040 | Jun 1998 | EP |
9849722 | Apr 1998 | WO |
Entry |
---|
P.C. Fazan et al., “A Highly Manufacturable Trench Isolation Process for Deep Submicron DRAMS's”, Proceedings of the International Electronic Device Meeting 1993, pp. 3.6.1-3.6.4. |