The present invention generally relates to the field of non-volatile memory (“NVM”) cells More specifically, the present invention relates to a method, circuit and system for erasing one or more NVM cells using one or more non-constant voltage erase pulses
Non-volatile memory (“NVM”) cells are fabricated in a large variety of structures, including but not limited to Poly-silicon floating gate, as shown in
Different threshold voltage ranges are associated with different logical states, and a NVM cell's threshold voltage level may be correlated to the amount of charge (e g electrons) stored in a charge storage region of the cell.
The amount of charge stored in a charge storage region of an NVM cell, may be increased by applying one or more programming pulses to the cell. While the amount of charge in the cell may decrease by applying an erase pulse to the NVM cell which may force the charge reduction in the cell's charge storage region, and consequently may decrease the NVM's threshold is voltage
A simple method used for operating NVM cells (e.g. programming, reading, and erasing) uses one or more reference structures such as reference cells to generate the reference levels (i.e. PVs, EVs) Each of the one or more reference structures may be compared against a memory cell being operated in order to determine a condition or state of the memory cell being operated. Generally, in order to determine whether an NVM cell is at a specific state, for example erased, programmed, or programmed at one of multiple possible program states within a multi-level cell (“MLC”), the cell's threshold level is compared to that of a reference structure whose threshold level is preset and known to be at a voltage level associated with the specific state being tested for Comparing the threshold voltage of an NVM cell to that of a reference cell is often accomplished using a sense amplifier. Various techniques for comparing an NVM's threshold voltage against those of one or more reference cells, in order to determine the state(s) of the NVM's cells, are well known
When programming an NVM cell to a desired state, a reference cell with a threshold voltage set at a voltage level defined as a “program verify” level for the given state may be compared to the threshold voltage of the cell being programmed in order to determine whether a charge storage area or region of the cell being programmed has been sufficiently charged so as to be considered “programmed” at the desired state If after a programming pulse has been applied to a cell, it has been determined that a cell has not been sufficiently charged in order for its threshold voltage to be at or above a “program verify” level (i e the threshold voltage of the relevant reference cell) associated with the target program state, the cell is typically hit with another programming pulse to try to inject more charge into its charge storage region Once a cell's threshold value reaches or exceeds the “program verify” level to which it is being programmed, no further programming pulse should be applied to the cell
Groups or sets of cells within an NVM array may be programmed and/or erased concurrently The group or set of NVM cells may consist of cells being programmed to (or erased from) the same logical state, or may consist of cells being programmed to (or erased from) each of several possible states, such as may be the case with MLC arrays. Since not all cells have the same susceptibility to being programmed and/or being erased, cells within a set of cells receiving programming or erasing pulses may not program or erase at the same rate Some cells may reach a target program state, or an erased state, before other cells in the same set of cells that are receiving programming or erasing pulses concurrently
A further issue associated with the erasure of one or more NVM cells within a set of cells being erased, is that channel current invoked during NVM (e g NROM) cell erasure using constant voltages pulses is characterized by a high peak, which quickly subsides (See
One of the drawbacks of such a channel current profile during erasure is that the channel current peak in each of the NVM cells being erased limits the amount of cells that can be erased simultaneously, either due to current consumption limits imposed on memory product and/or due to limitations on the circuits implemented in the NVM product (e.g. charge pump failures) Furthermore, the efficiency of the constant voltage erase pulse also subsides with time, as is evident from the graphs in
Although during the second half of a constant voltage erase pulse a current may still flow through the cells, erasure of the cells becomes very slow and weak Thus, the result of a channel current profile associated with a constant voltage erase pulse is, (1) relatively large current consumption during cell erasure, and (2) erasure inefficiency. These two drawbacks translate into reduced erase rates in many NVM (e g NROM) memory product (or any other memory technology incorporating tunnel assisted hot carrier injection), also reducing the number of cells which can be erased simultaneously and requiring that the duration of erase pulses be sufficiently long to compensate for erasure inefficiency By comparison, whereas a typical programming pulse may have a duration of several hundred nanoseconds, a typical erase pulse may have a duration of several microseconds.
There is a need in the field of NVM production for improved methods, circuits and systems of erasing one or more NVM cells.
The present invention is a method circuit and system for erasing one or more non-volatile memory (“NVM”) cells in an NVM array. According to some embodiments of the present invention, one or more NVM cells of a memory array may be erased using a controller and/or erase pulse source adapted to induce and/or invoke a substantially stable channel current in the one or more NVM cells during an erasure procedure According to some embodiments of the present invention, the substantially stable channel current induced by the controller and/or erase pulse source may be a substantially constant channel current.
According to some embodiments of the present invention, the controller and/or erase pulse source may produce an erase pulse having a non-constant voltage profile The erase pulse may be at a relatively smaller voltage level at its start and may grow to a relatively larger voltage level near its end An erase pulse according to some further embodiments of the present invention may have a substantially ramp-like, trapezoidal, exponential-growth-like, or asymptote-like voltage profile, or the erase pulse may be comprised of voltage steps
According to some embodiments of the present invention, the voltage profile of an erase pulse may be predefined, while according to other embodiments of the present invention, the voltage profile of the erase pulse may be dynamically adjusted during an erase procedure. Further embodiments of the present invention may include a current sensing circuit to sense the amount of current passing through the channels of one or more NVM cells during an erase procedure as result of an erase pulse being applied to the one or more NVM cells A controller may receive a signal from the current sensing circuit indicating the amount of current flowing through the one or more NVM cells and may cause an erase pulse source to adjust the voltage of the current pulse being applied to the one or more NVM cells so as to maintain a substantially stable and/or substantially constant channel current through the one or more NVM cells.
According to further embodiments of the present invention, an erase pulse may be applied to sub-groups or sub-sets of a set of NVM cells to be erased in a staggered sequence During the course of a signal erase pulse of a fixed duration, the pulse may first be applied to a first sub-set of cells. After some fraction of the fixed erase pulse duration, the pulse may than be applied to a second sub-set A cell select and masking circuit, coupled with a controller, may facilitate a single erase pulse being applied in a staggered sequence across several sub-sets of a set of NVM cells to be erased by the given erase pulse For example, during the first microsecond of a four microsecond erase pulse, the select circuit may only apply the erase pulse to a first sub-set of cells After the first microsecond, the select circuit may close a switch by which the erase pulse is also applied to a second sub-set, and so on. According to some embodiments of the present invention, a circuit connecting the erase pulse to the first sub-set of NVM cells to experience the erase pulse may be opened while other sub-sets are still experiencing the erase pulse
According to further embodiments of the present invention, a cell select and masking circuit, coupled with a controller which is receiving a signal from a current sensor, may facilitate a single erase pulse being applied in a staggered sequence across several sub-sets of a set of NVM cells to be erased by the given erase pulse The erase pulse may first be applied to a first sub-set of cells, and once the controller receives a signal from the sensor that the current to the erase first sub-set of cells is subsiding, the controller may signal the cell select circuit to apply the erase pulse to a second sub-set The current select circuit may apply the erase current to each additional sub-set of cells every-time the erase pulse current begins to subside and/or falls below some predefined current level, until all the sub-sets of cells have experienced the erase pulse.
The voltage of an erase pulse, according to some embodiments of the present invention, may be ramped from a low value to a desired voltage level. For example, the gates of the NVM cells to be erased may be fully biased to the desired level(s), the NVM cells' well may be grounded, the NVM cells' source lines may be floated after grounding, and the NVM cells' drain lines may be incrementally ramped to the desired level. The NVM cells' current consumption may be continuously monitored and the voltage ramp rate may be dynamically adjusted by a feedback loop in order to prevent the current from exceeding a pre-specified limit
The subject matter regarded as the invention is particularly pointed out and distinctly claimed in the concluding portion of the specification The invention, however, both as to organization and method of operation, together with objects, features and advantages thereof, may best be understood by reference to the following non limiting detailed description when read with the accompanied drawings in which:
It will be appreciated that for simplicity and clarity of these non-limiting illustrations, elements shown in the figures have not necessarily been drawn to scale For example, the dimensions of some of the elements may be exaggerated relative to other elements for clarity. Further, where considered appropriate, reference numerals may be repeated among the figures to indicate corresponding or analogous elements
In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the invention However it will be understood by those of ordinary skill in the art that the present invention may be practiced without these specific details In other instances, well-known methods and procedures have not been described in detail so as not to obscure the present invention
Unless specifically stated otherwise, as apparent from the following discussions, it is appreciated that throughout the specification discussions utilizing terms such as “processing”, “computing”, “calculating”, “determining”, or the like, refer to the action and/or processes of a computer or computing system, or similar electronic computing device, that manipulate and/or transform data represented as physical, such as electronic, quantities within the computing system's registers and/or memories into other data similarly represented as physical quantities within the computing system's memories, registers or other such information storage, transmission or display devices.
Embodiments of the present invention may include apparatuses for performing the operations herein This apparatus may be specially constructed for the desired purposes, or it may comprise a general purpose computer selectively activated or reconfigured by a computer program stored in the computer
The present invention is a method circuit and system for erasing one or more non-volatile memory (“NVM”) cells in an NVM array According to some embodiments of the present invention, one or more NVM cells of a memory array may be erased using a controller and/or erase pulse source adapted to induce and/or invoke a substantially stable channel current in the one or more NVM cells during an erasure procedure According to some embodiments of the present invention, the substantially stable channel current induced by the controller and/or erase pulse source may be a substantially constant channel current.
According to some embodiments of the present invention, the controller and/or erase pulse source may produce an erase pulse having a non-constant voltage profile The erase pulse may be at a relatively smaller voltage level at its start and may grow to a relatively larger voltage level near its end An erase pulse according to some further embodiments of the present invention may have a substantially ramp-like, trapezoidal, exponential-growth-like, or asymptote-like voltage profile, or the erase pulse may be comprised of voltage steps
According to some embodiments of the present invention, the voltage profile of an erase pulse may be predefined, while according to other embodiments of the present invention, the voltage profile of the erase pulse may be dynamically adjusted during an erase procedure Further embodiments of the present invention may include a current sensing circuit to sense the amount of current passing through the channels of one or more NVM cells during an erase procedure as result of an erase pulse being applied to the one or more NVM cells A controller may receive a signal from is the current sensing circuit indicating the amount of current flowing through the one or more NVM cells and may cause an erase pulse source to adjust the voltage of the current pulse being applied to the one or more NVM cells so as to maintain a substantially stable and/or substantially constant channel current through the one or more NVM cells
According to further embodiments of the present invention, an erase pulse may be applied to sub-groups or sub-sets of a set of NVM cells to be erased in a staggered sequence. During the course of a signal erase pulse of a fixed duration, the pulse may first be applied to a first sub-set of cells. After some fraction of the fixed erase pulse duration, the pulse may than be applied to a second sub-set A cell select and masking circuit, coupled with a controller, may facilitate a single erase pulse being applied in a staggered sequence across several sub-sets of a set of NVM cells to be erased by the given erase pulse For example, during the first microsecond of a four microsecond erase pulse, the select circuit may only apply the erase pulse to a first sub-set of cells After the first microsecond, the select circuit may close a switch by which the erase pulse is also applied to a second sub-set, and so on According to some embodiments of the present invention, a circuit connecting the erase pulse to the first sub-set of NVM cells to experience the erase pulse may be opened while other sub-sets are still experiencing the erase pulse.
The voltage of an erase pulse, according to some embodiments of the present invention, may be ramped from a low value to a desired voltage level For example, the gates of the NVM cells to be erased may be fully biased to the desired level(s), the NVM cells' well may be grounded, the NVM cells' source lines may be floated after grounding, and the NVM cells' drain lines may be incrementally ramped to the desired level. The NVM cells' current consumption may be continuously monitored and the voltage ramp rate may be dynamically adjusted by a feedback loop in order to prevent the current from exceeding a pre-specified limit.
Turing now to
According to further embodiments of the present invention, controller 100 may cause the erase pulse source to step the voltage of the erase pulse up and/or down in response to a signal received from a sensor 120. The sensor 120 may be a current sensor, a voltage sensor, a voltage derivative sensor or a current derivative sensor, and may provide the controller 100 a signal indicating some characteristic of the current (e.g. amount) flowing through the set of NVM cells 200 receiving the erase pulse. The controller 100 may cause the erase pulse source to adjust the voltage of an erase up or down in order to maintain a substantially stable channel current through one or more NVM cells within the set of NVM cells 200 receiving the erase pulse. For example, if either the current flowing through the channel is approaching or exceeding some predefined current limit, of if the current is increasing very rapidly (i e spiking), the controller 100 may direct the pulse source 110 to step down the voltage of the erase pulse, as exemplified in the middle portion of
Turning now to
Turning now to
According to further embodiments of the present invention, a cell select and masking circuit 130, coupled with a controller 100 which is receiving a signal from a current sensor 120, may facilitate a single erase pulse being applied in a staggered sequence across several sub-sets of a set of NVM cells 200 to be erased by the given erase pulse. The erase pulse may first be applied to a first sub-set of cells, and once the controller 100 receives a signal from the sensor 120 that the current to the erase first sub-set of cells is subsiding, the controller 100 may signal the cell select circuit 130 to apply the erase pulse to a second sub-set. The current select circuit 130 may apply the erase current to each additional sub-set of cells every-time the erase pulse current begins to subside and/or falls below some predefined current level, until all the sub-sets of cells have experienced the erase pulse
Turning now to
While certain features of the invention have been illustrated and described herein, many modifications, substitutions, changes, and equivalents will now occur to those skilled in the art. It is, therefore, to be understood that the appended claims are intended to cover all such modifications and changes as fall within the true spirit of the invention.
This application claims the benefit of U.S. provisional patent application 60/558,105 filed Apr. 1, 2004.
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/IL2005/000367 | 4/3/2005 | WO | 00 | 6/7/2005 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2005/094178 | 10/13/2005 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
3881180 | Gosney, Jr. | Apr 1975 | A |
3895360 | Cricchi et al. | Jul 1975 | A |
4342102 | Puar | Jul 1982 | A |
4388705 | Sheppard | Jun 1983 | A |
4527257 | Cricchi | Jul 1985 | A |
4667217 | Janning | May 1987 | A |
4725984 | Ip et al. | Feb 1988 | A |
4733106 | Shin et al. | Mar 1988 | A |
4742491 | Liang et al. | May 1988 | A |
4761764 | Watanabe | Aug 1988 | A |
4857770 | Partovi et al. | Aug 1989 | A |
4916671 | Ichiguchi | Apr 1990 | A |
4961010 | Davis | Oct 1990 | A |
5027321 | Park | Jun 1991 | A |
5029063 | Lingstaedt et al. | Jul 1991 | A |
5042009 | Kazerounian et al. | Aug 1991 | A |
5081371 | Wong | Jan 1992 | A |
5142495 | Canepa | Aug 1992 | A |
5142496 | Van Buskirk | Aug 1992 | A |
5237213 | Tanoi | Aug 1993 | A |
5241497 | Komarek | Aug 1993 | A |
5276646 | Kim et al. | Jan 1994 | A |
5280420 | Rapp | Jan 1994 | A |
5289412 | Frary et al. | Feb 1994 | A |
5293563 | Ohta | Mar 1994 | A |
5295108 | Higa | Mar 1994 | A |
5305262 | Yoneda | Apr 1994 | A |
5335198 | Van Buskirk et al. | Aug 1994 | A |
5345425 | Shikatani | Sep 1994 | A |
5349221 | Shimoji | Sep 1994 | A |
5359554 | Odake et al. | Oct 1994 | A |
5361343 | Kosonocky et al. | Nov 1994 | A |
5381374 | Shiraishi et al. | Jan 1995 | A |
5400286 | Chu et al. | Mar 1995 | A |
5418743 | Tomioka et al. | May 1995 | A |
5422844 | Wolstenholme et al. | Jun 1995 | A |
5424978 | Wada et al. | Jun 1995 | A |
5434825 | Harari et al. | Jul 1995 | A |
5440505 | Fazio et al. | Aug 1995 | A |
5450341 | Sawada et al. | Sep 1995 | A |
5450354 | Sawada et al. | Sep 1995 | A |
5477499 | Van Buskirk et al. | Dec 1995 | A |
5508968 | Collins et al. | Apr 1996 | A |
5521870 | Ishikawa | May 1996 | A |
5523972 | Rashid et al. | Jun 1996 | A |
5530803 | Chang et al. | Jun 1996 | A |
5534804 | Woo | Jul 1996 | A |
5537358 | Fong | Jul 1996 | A |
5544116 | Chao et al. | Aug 1996 | A |
5553030 | Tedrow et al. | Sep 1996 | A |
5557221 | Taguchi et al. | Sep 1996 | A |
5557570 | Iwahashi | Sep 1996 | A |
5559687 | Nicollini et al. | Sep 1996 | A |
5563823 | Yiu et al. | Oct 1996 | A |
5568085 | Eitan et al. | Oct 1996 | A |
5579199 | Kawamura et al. | Nov 1996 | A |
5581252 | Thomas | Dec 1996 | A |
5583808 | Brahmbhatt | Dec 1996 | A |
5590074 | Akaogi et al. | Dec 1996 | A |
5596527 | Tomioka et al. | Jan 1997 | A |
5608679 | Mi et al. | Mar 1997 | A |
5612642 | McClinyock | Mar 1997 | A |
5623438 | Guritz et al. | Apr 1997 | A |
5627790 | Golla et al. | May 1997 | A |
5633603 | Lee | May 1997 | A |
5636288 | Bonneville et al. | Jun 1997 | A |
5644531 | Kuo et al. | Jul 1997 | A |
5657332 | Auclair et al. | Aug 1997 | A |
5663907 | Frayer et al. | Sep 1997 | A |
5672959 | Der | Sep 1997 | A |
5675280 | Nomura | Oct 1997 | A |
5677869 | Fazio et al. | Oct 1997 | A |
5689459 | Chang et al. | Nov 1997 | A |
5694356 | Wong et al. | Dec 1997 | A |
5708608 | Park et al. | Jan 1998 | A |
5712815 | Bill et al. | Jan 1998 | A |
5715193 | Norman | Feb 1998 | A |
5717581 | Canclini | Feb 1998 | A |
5717632 | Richart et al. | Feb 1998 | A |
5717635 | Akatsu | Feb 1998 | A |
5726946 | Yamagata et al. | Mar 1998 | A |
5748534 | Dunlap et al. | May 1998 | A |
5751637 | Chen et al. | May 1998 | A |
5754475 | Bill et al. | May 1998 | A |
5760634 | Fu | Jun 1998 | A |
5768193 | Lee et al. | Jun 1998 | A |
5771197 | Kim | Jun 1998 | A |
5774395 | Richart et al. | Jun 1998 | A |
5781476 | Seki et al. | Jul 1998 | A |
5784314 | Sall et al. | Jul 1998 | A |
5787036 | Okazawa | Jul 1998 | A |
5805500 | Campardo et al. | Sep 1998 | A |
5808506 | Tran | Sep 1998 | A |
5812449 | Song | Sep 1998 | A |
5812456 | Hull et al. | Sep 1998 | A |
5812457 | Arase | Sep 1998 | A |
5815435 | Van Tran | Sep 1998 | A |
5828601 | Hollmer et al. | Oct 1998 | A |
5841700 | Chang | Nov 1998 | A |
5847441 | Cutter et al. | Dec 1998 | A |
5861771 | Matsuda et al. | Jan 1999 | A |
5867429 | Chen et al. | Feb 1999 | A |
5870334 | Hemink et al. | Feb 1999 | A |
5870335 | Khan et al. | Feb 1999 | A |
5880620 | Gitlin et al. | Mar 1999 | A |
5886927 | Takeuchi | Mar 1999 | A |
RE36179 | Shimoda | Apr 1999 | E |
5892710 | Fazio et al. | Apr 1999 | A |
5903031 | Yamada et al. | May 1999 | A |
5910924 | Tanaka et al. | Jun 1999 | A |
5926409 | Engh et al. | Jul 1999 | A |
5933367 | Matsuo et al. | Aug 1999 | A |
5936888 | Sugawara | Aug 1999 | A |
5940332 | Artieri | Aug 1999 | A |
5946258 | Evertt et al. | Aug 1999 | A |
5949714 | Hemink et al. | Sep 1999 | A |
5949728 | Liu et al. | Sep 1999 | A |
5963412 | En | Oct 1999 | A |
5969993 | Takeshima | Oct 1999 | A |
5982666 | Campardo | Nov 1999 | A |
5986940 | Atsumi et al. | Nov 1999 | A |
5991202 | Derhacobian et al. | Nov 1999 | A |
5999444 | Fujiwara et al. | Dec 1999 | A |
6005423 | Schultz | Dec 1999 | A |
6011725 | Eitan | Jan 2000 | A |
6028324 | Su et al. | Feb 2000 | A |
6034896 | Ranaweera et al. | Mar 2000 | A |
6040610 | Noguchi et al. | Mar 2000 | A |
6044019 | Cernea et al. | Mar 2000 | A |
6044022 | Nachumovsky | Mar 2000 | A |
6064251 | Park | May 2000 | A |
6064591 | Takeuchi et al. | May 2000 | A |
6074916 | Cappelletti | Jun 2000 | A |
6075402 | Ghilardelli | Jun 2000 | A |
6075724 | Li et al. | Jun 2000 | A |
6078518 | Chevallier | Jun 2000 | A |
6081456 | Dadashev | Jun 2000 | A |
6084794 | Lu et al. | Jul 2000 | A |
6091640 | Kawahara et al. | Jul 2000 | A |
6094095 | Murray et al. | Jul 2000 | A |
6097639 | Choi et al. | Aug 2000 | A |
6107862 | Mukainakano et al. | Aug 2000 | A |
6108240 | Lavi et al. | Aug 2000 | A |
6108241 | Chevallier | Aug 2000 | A |
6118207 | Ormerod et al. | Sep 2000 | A |
6118692 | Banks | Sep 2000 | A |
6128226 | Eitan et al. | Oct 2000 | A |
6130572 | Ghilardelli et al. | Oct 2000 | A |
6130574 | Bloch et al. | Oct 2000 | A |
6134156 | Eitan | Oct 2000 | A |
6147904 | Liron | Nov 2000 | A |
6150800 | Kinoshita et al. | Nov 2000 | A |
6154081 | Pakkala et al. | Nov 2000 | A |
6157242 | Fukui | Dec 2000 | A |
6157570 | Nachumovsky | Dec 2000 | A |
6169691 | Pasotti et al. | Jan 2001 | B1 |
6181605 | Hollmer et al. | Jan 2001 | B1 |
6185143 | Perner et al. | Feb 2001 | B1 |
6188211 | Rincon-Mora et al. | Feb 2001 | B1 |
6192445 | Rezvani | Feb 2001 | B1 |
6198342 | Kawai | Mar 2001 | B1 |
6201737 | Hollmer et al. | Mar 2001 | B1 |
6205056 | Pan et al. | Mar 2001 | B1 |
6208200 | Arakawa | Mar 2001 | B1 |
6214666 | Mehta | Apr 2001 | B1 |
6215148 | Eitan | Apr 2001 | B1 |
6215697 | Lu et al. | Apr 2001 | B1 |
6215702 | Derhacobian et al. | Apr 2001 | B1 |
6219277 | Devin et al. | Apr 2001 | B1 |
6222762 | Guterman et al. | Apr 2001 | B1 |
6233180 | Eitan et al. | May 2001 | B1 |
6240032 | Fukumoto | May 2001 | B1 |
6240040 | Akaogi et al. | May 2001 | B1 |
6246555 | Tham | Jun 2001 | B1 |
6252799 | Liu et al. | Jun 2001 | B1 |
6256231 | Lavi et al. | Jul 2001 | B1 |
6266281 | Derhacobian et al. | Jul 2001 | B1 |
6282133 | Nakagawa et al. | Aug 2001 | B1 |
6285246 | Basu | Sep 2001 | B1 |
6285589 | Kajitani | Sep 2001 | B1 |
6285614 | Mulatti et al. | Sep 2001 | B1 |
6292394 | Cohen et al. | Sep 2001 | B1 |
6297974 | Ganesan et al. | Oct 2001 | B1 |
6304485 | Harari et al. | Oct 2001 | B1 |
6307784 | Hamilton et al. | Oct 2001 | B1 |
6307807 | Sakui et al. | Oct 2001 | B1 |
6320786 | Chang et al. | Nov 2001 | B1 |
6324094 | Chevallier | Nov 2001 | B1 |
6326265 | Liu et al. | Dec 2001 | B1 |
6330192 | Ohba et al. | Dec 2001 | B1 |
6331950 | Kuo et al. | Dec 2001 | B1 |
6339556 | Watanabe | Jan 2002 | B1 |
6343033 | Parker | Jan 2002 | B1 |
6351415 | Kushnarenko | Feb 2002 | B1 |
6353356 | Liu | Mar 2002 | B1 |
6353554 | Banks | Mar 2002 | B1 |
6353555 | Jeong | Mar 2002 | B1 |
6356469 | Roohparvar et al. | Mar 2002 | B1 |
6359501 | Lin et al. | Mar 2002 | B2 |
6385086 | Mihara et al. | May 2002 | B1 |
6396741 | Bloom et al. | May 2002 | B1 |
6400209 | Matsuyama et al. | Jun 2002 | B1 |
6407537 | Antheunis | Jun 2002 | B2 |
6426898 | Mihnea et al. | Jul 2002 | B1 |
6433624 | Grossnickle et al. | Aug 2002 | B1 |
6438031 | Fastow | Aug 2002 | B1 |
6442074 | Hamilton et al. | Aug 2002 | B1 |
6445030 | Wu et al. | Sep 2002 | B1 |
6449190 | Bill | Sep 2002 | B1 |
6452438 | Li | Sep 2002 | B1 |
6456528 | Chen | Sep 2002 | B1 |
6456533 | Hamilton et al. | Sep 2002 | B1 |
6469929 | Kushnarenko et al. | Oct 2002 | B1 |
6469935 | Hayashi | Oct 2002 | B2 |
6477085 | Kuo | Nov 2002 | B1 |
6490204 | Bloom et al. | Dec 2002 | B2 |
6496414 | Kasa et al. | Dec 2002 | B2 |
6510082 | Le et al. | Jan 2003 | B1 |
6512501 | Nagaoka et al. | Jan 2003 | B1 |
6512701 | Hamilton et al. | Jan 2003 | B1 |
6515909 | Wooldridge | Feb 2003 | B1 |
6519180 | Tran et al. | Feb 2003 | B2 |
6519182 | Derhacobian et al. | Feb 2003 | B1 |
6522585 | Pasternak | Feb 2003 | B2 |
6525969 | Kurihara et al. | Feb 2003 | B1 |
6529412 | Chen et al. | Mar 2003 | B1 |
6529417 | Roohparvar | Mar 2003 | B2 |
6535020 | Yin | Mar 2003 | B1 |
6535434 | Maayan et al. | Mar 2003 | B2 |
6552387 | Eitan | Apr 2003 | B1 |
6567303 | Hamilton et al. | May 2003 | B1 |
6567312 | Torii et al. | May 2003 | B1 |
6574139 | Kurihara | Jun 2003 | B2 |
6577514 | Shor et al. | Jun 2003 | B2 |
6577532 | Chevallier | Jun 2003 | B1 |
6577547 | Ukon | Jun 2003 | B2 |
6584017 | Maayan et al. | Jun 2003 | B2 |
6590811 | Hamilton et al. | Jul 2003 | B1 |
6594181 | Yamada | Jul 2003 | B1 |
6608526 | Sauer | Aug 2003 | B1 |
6614295 | Tsuchi | Sep 2003 | B2 |
6618290 | Wang et al. | Sep 2003 | B1 |
6624672 | Confaloneri et al. | Sep 2003 | B2 |
6627555 | Eitan et al. | Sep 2003 | B2 |
6636440 | Maayan et al. | Oct 2003 | B2 |
6639837 | Takano et al. | Oct 2003 | B2 |
6639844 | Liu et al. | Oct 2003 | B1 |
6639849 | Takahashi et al. | Oct 2003 | B2 |
6643177 | Le et al. | Nov 2003 | B1 |
6643178 | Kurihara | Nov 2003 | B2 |
6643181 | Sofer et al. | Nov 2003 | B2 |
6643184 | Pio | Nov 2003 | B2 |
6650568 | Iijima | Nov 2003 | B2 |
6654296 | Jang et al. | Nov 2003 | B2 |
6665769 | Cohen et al. | Dec 2003 | B2 |
6677805 | Shor et al. | Jan 2004 | B2 |
6690602 | Le et al. | Feb 2004 | B1 |
6700818 | Shappir et al. | Mar 2004 | B2 |
6723518 | Papsidero et al. | Apr 2004 | B2 |
6768165 | Eitan | Jul 2004 | B1 |
6788579 | Gregori et al. | Sep 2004 | B2 |
6791396 | Shor et al. | Sep 2004 | B2 |
6798699 | Mihnea et al. | Sep 2004 | B2 |
6831872 | Matsuoka | Dec 2004 | B2 |
6836431 | Chang | Dec 2004 | B2 |
6839280 | Chindalore et al. | Jan 2005 | B1 |
6885585 | Maayan et al. | Apr 2005 | B2 |
6917544 | Maayan et al. | Jul 2005 | B2 |
6928001 | Avni et al. | Aug 2005 | B2 |
20020004878 | Norman | Jan 2002 | A1 |
20020132436 | Eliyahu et al. | Sep 2002 | A1 |
20020145465 | Shor et al. | Oct 2002 | A1 |
20020191465 | Maayan et al. | Dec 2002 | A1 |
20030021155 | Yachareni et al. | Jan 2003 | A1 |
20030072192 | Bloom et al. | Apr 2003 | A1 |
20030076710 | Sofer et al. | Apr 2003 | A1 |
20030117841 | Yamashita | Jun 2003 | A1 |
20030131186 | Buhr | Jul 2003 | A1 |
20030142544 | Maayan et al. | Jul 2003 | A1 |
20030202411 | Yamada | Oct 2003 | A1 |
20030206435 | Takahashi | Nov 2003 | A1 |
20030208663 | Van Buskirk et al. | Nov 2003 | A1 |
20030214844 | Iijima | Nov 2003 | A1 |
20030218913 | Le et al. | Nov 2003 | A1 |
20030227796 | Miki et al. | Dec 2003 | A1 |
20040012993 | Kurihara | Jan 2004 | A1 |
20040013000 | Torii | Jan 2004 | A1 |
20040027858 | Takahashi et al. | Feb 2004 | A1 |
20040151034 | Shor et al. | Aug 2004 | A1 |
20040153621 | Polansky et al. | Aug 2004 | A1 |
20050105337 | Cohen et al. | May 2005 | A1 |
Number | Date | Country |
---|---|---|
0 656 628 | Jun 1995 | EP |
0693781 | Jan 1996 | EP |
0 843 398 | May 1998 | EP |
1 071 096 | Jan 2001 | EP |
1126468 | Aug 2001 | EP |
0740307 | Dec 2001 | EP |
1164597 | Dec 2001 | EP |
001217744 | Mar 2004 | EP |
63-249375 | Oct 1988 | JP |
3-285358 | Dec 1991 | JP |
07193151 | Jul 1995 | JP |
408106791 | Apr 1996 | JP |
408297988 | Nov 1996 | JP |
09162314 | Jun 1997 | JP |
10-106276 | Apr 1998 | JP |
10 334676 | Dec 1998 | JP |
02001118392 | Apr 2001 | JP |
02002216488 | Aug 2002 | JP |
WO 0046808 | Aug 2000 | WO |
WO 0165566 | Sep 2001 | WO |
WO 0165567 | Sep 2001 | WO |
WO 0184552 | Nov 2001 | WO |
WO 0243073 | May 2002 | WO |
WO 03036651 | May 2003 | WO |
WO 03063167 | Jul 2003 | WO |
WO 03063168 | Jul 2003 | WO |
WO 03079370 | Sep 2003 | WO |
WO 03088258 | Oct 2003 | WO |
WO 03088259 | Oct 2003 | WO |
WO 03088260 | Oct 2003 | WO |
WO 03088261 | Oct 2003 | WO |
WO 03100790 | Dec 2003 | WO |
Number | Date | Country | |
---|---|---|---|
20060056240 A1 | Mar 2006 | US |
Number | Date | Country | |
---|---|---|---|
60558105 | Apr 2004 | US |