Number | Name | Date | Kind |
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5156994 | Moslehi | Oct 1992 | |
5387535 | Wilmsmeyer | Feb 1995 | |
5482895 | Hayashi et al. | Jan 1996 | |
6001737 | Horiuchi et al. | Dec 1999 | |
6008111 | Fushida et al. | Dec 1999 | |
6015752 | Xiang et al. | Jan 2000 | |
6072222 | Nistler | Jun 2000 |
Number | Date | Country |
---|---|---|
0651076 A1 | May 1995 | EPX |
Entry |
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Wolf Silicon Processing for the VLSI Era: vol. II--Process Integration, 1990, month unknown, p. 389. |
Wolf, Silicon Processing for the VLSI Era, vol. 3: The Submicron MOSFET, pp. 595-598, 1995, month unknown. |