Number | Name | Date | Kind |
---|---|---|---|
4442591 | Haken | Apr 1984 | |
4769686 | Horiuchi et al. | Sep 1988 | |
5141890 | Haken | Aug 1992 |
Entry |
---|
Ting et al., Silicide for Contacts and Interconnects, IEDM, 1984, pp. 110-113. |
Leung et al., "Refractory Metal Silicide/N.sup.+ Polysilicon in CMOS/SOS," IEEE .cndot.IEDM Technical Digest, 1980, pp. 827-830. |