Claims
- 1. a procedure for the detection of an element in a sample comprising the steps of:measuring a first image of intensities Ilpof the sample for an energy loss before an element edge using a transmission electronic microscope; measuring a second image of intensities I2′p for an energy loss in the area of the element edge; determining non-element-specific intensities I1of the sample for an energy loss before the element specific signal edge for various points at a reference sample point that does not contain the element; determining non-element-specific intensities I2 for and energy loss in the area of the element specific signal edge; calculating an approximation function I2 (I1); calculating an image of element-specific intensities IE from these values by calculating the corresponding intensity I2p with approximation function for every point in the first image with the intensity I1P and by determining the difference between the measured intensity I2′p and and the calculated intensity I2p as the element-specific intensity IE for the corresponding point in the second image.
- 2. A procedure according to claim 1, wherein the reference sample displays a configuration with different sample thicknesses.
- 3. A procedure according to claim 2, wherein the configuration has the form of a ramp.
- 4. A procedure according to claim 1, wherein the reference sample displays at least the thickness of the sample.
- 5. A procedure according to claim 1, wherein the reference sample contains the main component of the sample.
- 6. A procedure according to claim 1, wherein the reference sample consists of pure carbon or silicon.
- 7. A procedure according to claim 1, where in the intensity of each point is replaced with a mean value of its environment to calculate the corresponding intensity I2p.
- 8. A procedure according to claim 1, wherein the quality of the approximation function I2 is determined by means of statistical functions.
- 9. A procedure according to claim 1, wherein the detected material is the element phosphorus.
- 10. A procedure according to claim 1, further comprising the steps of:measuring at least a third image of intensities I3p for a third energy loss, lying before the element specific signal edge, and differing from the energy loss of the first image; calculating third intensities I1, I3; calculating the image of the element-specific intensities IE, by calculating the corresponding intensity I2p with the approximation function for every point in the first and third image; and determining the difference between the measured intensity I2′p and the calculated intensity I2p as the element-specific intensity IE for the corresponding point in the second image.
Priority Claims (1)
Number |
Date |
Country |
Kind |
197 28 698 |
Jul 1997 |
DE |
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Parent Case Info
This application is a continuation of PCT International Application No. PCT/DE98/01865, filed on Jul. 6, 1998.
US Referenced Citations (6)
Non-Patent Literature Citations (1)
Entry |
H. Tenailleau et al. (1992) “A New Background Substraction for Low-Energy EELS Core Edges” The Journal of Microscopy, 166(3):297-306. |
Continuations (1)
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Number |
Date |
Country |
Parent |
PCT/DE98/01865 |
Jul 1998 |
US |
Child |
09/476514 |
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US |