The invention relates generally to the spectral characterization of light. More particularly, the invention relates to the determination of wavelength using vertically stacked photodetectors in optically active materials.
Digital imaging systems typically utilize one or more sensors having an array of photodetectors. Each photodetector is associated with an image pixel. Color imagers generally employ photodetector arrays in which a color filter is fabricated over each photodetector. The wavelength range of each color filter varies according to the position of the photodetector in the array. For example, in imaging systems utilizing red-green-blue (RGB) color data, each photodetector has a red, green or blue filter so that only optical energy within the wavelength band passed by the filter is detected.
Using multiple photodetectors in the image plane to generate an RGB value results in color artifacts and diminished color clarity. Image capture sensors have been developed which rely on the variation in the absorption coefficient of a sensor material as a function of wavelength. More specifically, the sensors are based on the variation in the penetration depth of light as a function of wavelength. For example, a detector structure has been developed in which three vertically stacked photodetectors are used to detect three colors. Each photodetector is fabricated with a certain thickness and doping concentration. The photodetector nearest the surface of the structure senses blue light, the photodetector in the middle of the stack senses green light, and the photodetector at the greatest depth from the surface senses red light. Optical filtering is employed to improve discrimination of the blue, green and red detection bands. Advantageously, each RGB pixel is defined by a single photodetector stack and, therefore, higher image quality is achieved; however, the sensor design is complex and optimized only for one set of wavelength bands. Moreover, such sensors require expensive manufacturing processes capable of fabricating tightly controlled layer thicknesses and doping concentrations necessary to achieve sensitivity to the three defined wavelength bands.
In one aspect, the invention features a method for determining a wavelength of light incident on a semiconductor device comprising an upper region of a first conductivity type disposed on a lower region of a second conductivity type opposite the first conductivity type. A first current generated in response to light that is absorbed in the upper region is measured and a second current generated in response to light that is absorbed in the lower region is measured. The wavelength of the light incident on the semiconductor device is determined in response to the measured first and second currents and a predetermined correspondence between the first and second currents as a function of wavelength.
In another aspect, the invention features a method for determining a wavelength of light incident on a semiconductor device comprising an upper photodiode vertically disposed on a lower photodiode. The upper photodiode is biased at a first bias voltage and the lower photodiode is biased at a second bias voltage. A first current generated by the upper photodiode and a second current generated by the lower photodiode responsive to the light incident on the semiconductor device are measured. At least one of the first bias voltage and the second bias voltage are changed. A modified first current and a modified second current responsive to the light incident on the semiconductor device are measured. The wavelength of the light incident on the semiconductor device is determined in response to the measured first and second currents, the measured modified first and second currents, and a predetermined correspondence between the measured and modified first and second currents as a function of wavelength and bias voltage.
In yet another aspect, the invention features a device for determining a wavelength of light. The device includes a semiconductor structure, a first current module, a second current module and a processor. The semiconductor structure has an upper photodiode vertically disposed on a lower photodiode. The first current module communicates with the upper photodiode to measure a first current generated in the upper photodiode in response to light that is incident on the semiconductor structure. The second current module communicates with the lower photodiode to measure a second current generated in response to the light that is incident on the semiconductor structure. The processor communicates with the first and second current modules to determine the wavelength of the light that is incident on the semiconductor structure according to the measured first and second currents and a predetermined correspondence between the first and second currents as a function of wavelength.
In still another aspect, the invention features a method for determining a wavelength of light incident on an optically active material having a plurality of stacked regions of alternating conductivity type. For each region, a current generated in response to light that is absorbed in the region is measured. The wavelength of the light incident on the optically active material is determined according to the measured currents and a predetermined correspondence between the measured currents as a function of wavelength.
The above and further advantages of this invention may be better understood by referring to the following description in conjunction with the accompanying drawings, in which like numerals indicate like structural elements and features in the various figures. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention.
In brief overview, the present invention relates to a method and a photodetector device for determining wavelength and optical power of an optical signal. The device can be fabricated in a variety of optically active materials. For example, the device can be fabricated using standard VLSI techniques because strict control of photodetector layer thicknesses and doping concentrations is not required. The device provides true wavelength responsivity over a wide spectral range. Signal processing circuitry enables both wavelength and optical power to be sensed by each dual photodetector element in a detector array. Although described below primarily as a silicon semiconductor device with a spectral range limited to visible and near infrared (IR) wavelengths, other embodiments employ other column IV materials, III-V materials, II-VI materials, and possible combinations of these materials such that wavelength sensitivity can be tailored to cover a wide range of operating wavelengths extending from ultraviolet (UV) wavelengths to the long-IR wavelengths.
Optical filters are not required to enable determination of wavelength. Each photodetector device provides all the information to determine the wavelength of the incident light. Thus averaging among a group of pixels is not necessary. Consequently, arrays of stacked photodetectors according to the invention yield improved image quality over conventional imaging arrays.
The device can be fabricated as a structure having only two vertically stacked photodetectors. Fabrication can be implemented using standard complementary metal oxide semiconductor (CMOS) fabrication techniques. Contrary to other stacked photodetector sensors, the thicknesses of the photodetector layers do not depend on operating wavelengths. Instead, the two photodetectors represent measuring points in the substrate where the concentrations of electron hole pairs (EHPs) are determined. By measuring current from both photodetectors at different bias voltages, various wavelengths (or wavelength bands) and the optical power at those wavelengths can be determined.
Operation at wavelengths outside the spectral sensitivity of a detector array using one material (e.g., silicon) can be achieved with a separate photodetector array connected to external signal processing circuitry. Alternatively, higher frame rates can be achieved for a given semiconductor material using a second photodetector array with separate signal processing circuitry. The elimination of external filters, cooling systems, and multiple sensors for different spectral bands results in improved reliability, lower cost, and high performance colorimetric imaging in small imagers. These photodetectors enable many of the benefits of multispectral technology without complex architectures relying on spectrometers, multi-channel electronics and high bandwidth communication links. Instead, only two channels of information are used to determine wavelength.
If the photodetector structure 18 is irradiated with light at normal incidence and an optical power PIn, the number of photons per second (N) incident on the photodetector surface 34 is given by
where Ephoton the photon energy, λ is the wavelength of the photons, h is Planck's constant, and c is the speed of light in a vacuum. To absorb the incident photons and convert them to current, the photon energy Ephoton must be greater than the band-gap energy Eg of the semiconductor. Thus the following relationship must be satisfied for photon absorption to occur:
Each absorbed photon creates a single electron-hole pair (EHP). As illustrated in
The optical absorption coefficient α for the distribution in silicon according to wavelength is depicted in
N(x)=N0e(−α*x) (3)
where N0 is the number of photons per second incident on the surface of the photodetector and α is the wavelength dependent absorption coefficient. If every absorbed photon is converted into an EHP, equation (3) also defines the distribution of optically generated EHPs in the semiconductor.
Analysis of the distribution of EHPs yields a spectral characterization of the light incident on the photodetector. More specifically, the number of photons per second N incident on the photodetector is determined by integration over depth and wavelength as:
where a and b are the minimum and maximum depths, respectively, defining a specific region of the semiconductor material, and minimum material wavelength and maximum material wavelength represent the lower and upper spectral wavelength limits for EHP generation caused by the light incident on the semiconductor material. The depths a and b can be selected to represent the upper or lower photodetector region of the semiconductor structure.
The photodetectors collect the EHPs and generate an electric current proportional to the rate of collection. A reverse bias voltage applied to the PN junction produces an electrical field that collects all of the optically generated EHPs within a minority carrier diffusion length of the field region. The collected EHPs make up the photocurrent (Iop) which is given by:
Iop=qAGoptActive (5)
where q is the charge of an electron, A is the area of the photodetector, Gop is the generation rate of EHPs per unit volume, and tActive is the thickness of the region where EHP collection occurs. The product A tActive defines the volume from which optically generated EHPs are collected to produce the photocurrent. Thus the current Iop is given by:
Iop=qNabs (6)
where Nabs is the number of photons per second absorbed in the collection volume. Nabs can be calculated using Equation (3) by subtracting the photon rate at the bottom of the collection volume N(X=Xbottom) from the photon concentration at the top of the collection volume N(X=XTop).
As described above, different wavelengths produce different distributions of photons in the device. Consequently, different wavelengths lead to different EHP concentrations in the active regions of the dual stacked photodetector structure of
Current Boundary Method with Fixed Biasing
As described above, different wavelengths yield different penetration depths. A single photodetector produces a current that is based on the photon absorption rate within its active volume. The photon absorption rate is based on wavelength and the optical power of the incident light. As a result, a single photodetector is not sufficient to determine wavelength based solely on the photon absorption rate. According to equations 1, 3, and 5; however, current measurements from two stacked photodetectors can be used to determine wavelength and optical power.
where XMid is the depth defined between the interface of the p+ region and the n type well and the interface of the n type well and the p type substrate, and XBottom is depth of the bottom of the substrate.
The ratio r of the two photodetector currents defines the wavelength of the incident light. The optical power of the incident light is linearly proportional to the current in both photodetectors over an operational optical power range. Once the wavelength is known, the measured current from one of the photodetectors is used to determine the optical power Power as:
where Idiode is the current generated by one of the photodetectors, α is the absorption coefficient for the wavelength determined from the ratio r of currents, and XTop and XBottom are the top and bottom depths that define the active thickness of the photodetector.
In the method described above, the ratio r is determined for a single current from each photodetector for a fixed bias voltage applied to each photodetector. This method can be suitable for applications in which only the average wavelength and optical power are desired.
Current Boundary Method with Multiple Biases
Referring again to
where XU and XL are the limits of the charge regions for the upper and lower photodetectors, JU and JL are the junction depths of the upper and lower photodetectors, εo is the permittivity of free space, εr is the dielectric constant of the semiconductor used, V0 is the contact potential, Vb is the applied bias voltage (which can be independent for the upper and lower photodetectors), q is the charge of an electron; N(a(pplus)) is the doping of the p+ doped diffusion material, N(d(nwell)) is the doping of the n doped well region, and N(a(psubstrate)) is the doping of the p doped substrate. By changing the bias voltages in equations (10) and (11), the regions contributing to the current flow for each photodetector are changed. Consequently, multiple current measurements can be made for each photodetector to determine the contributions to the upper and lower detector currents by narrow wavelength bands.
The ability to analyze the currents from the two photodetectors for multiple bias voltages creates, in effect, multiple “virtual photodetectors” 70A through 70F (generally 70) as depicted in
The circuit 74 also includes a bias control module (not shown) to control and change the bias voltages applied to the photodetectors. For example, the voltage at node V2 can be changed to alter the bias across the upper photodetector and move the diffusion boundary. Alternatively, the voltage at the common cathode of the photodetector photodiodes can be changed to move the diffusion boundary if the doping concentrations of the p+ region and the p type substrate are different.
While the invention has been shown and described with reference to specific embodiments, it should be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.
This application claims the benefit of the filing date of co-pending U.S. Provisional Application Serial No. 60/670,741, filed Apr. 13, 2005, titled “A Direct Method to Compute Optical Wavelengths,” the entirety of which provisional application is incorporated by reference herein.
Number | Date | Country | |
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60670741 | Apr 2005 | US |