Number | Date | Country | Kind |
---|---|---|---|
62-245035 | Sep 1987 | JPX | |
62-253423 | Oct 1987 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4172004 | Alcorn et al. | Oct 1979 | |
4350564 | Wei | Sep 1982 | |
4725375 | Fujii et al. | Feb 1988 |
Number | Date | Country |
---|---|---|
111366 | Jul 1983 | JPX |
Entry |
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Kiyotake Naroaka and Koji Nihei, "Photo-Etching and Fine Structure Processing", Sogodenshi Shuppansha, May 10, 1977. |