This application relates to and claims the benefit and priority to International Application No. PCT/EP2020/061966, filed Apr. 29, 2020 which claims the benefit and priority to European Patent Application No. EP19382328.3 filed on Apr. 30, 2019.
The present disclosure relates to a method and apparatus for extracting a transverse magneto-optic Kerr effect signal in an ellipsometric measurement procedure upon a sample having an at least partially reflecting surface.
The magneto-optical Kerr effect (MOKE) is a well-established method for the study of the magnetization properties of thin films and surfaces. It is based upon small, magnetization-induced changes in the optical properties of the material under investigation, which in turn modify the polarization and/or intensity of reflected light.
MOKE is classified according to the magnetization orientation in reference to the flat surface of a sample and the plane of incidence of a light beam that falls upon the surface (the optical plane of incidence is the plane that contains the surface normal and the propagation vector of the incoming radiation, or, equivalently, the plane that contains both the incoming and the reflected light ray). When the magnetization is perpendicular to the sample surface, the effect is known as polar MOKE. When the magnetization is parallel to the sample surface, the effect is called longitudinal MOKE or transverse MOKE, with the former referring to the magnetization lying in the plane of incidence and the latter perpendicular to it. Depending on the specific magnetization orientation, the magnetic material affects different aspects of the reflected light. In the case of polar and longitudinal MOKE, the sample magnetization leads to a rotation and ellipticity change of the reflected light polarization that inverts if the magnetization itself is inverted (magnetization reversal). In transverse geometry, one observes a tiny change in the intensity of the reflected light for incident p-polarized radiation upon magnetization reversal.
Ellipsometry is an optical technique that measures the change of polarization upon reflection or transmission of light.
Studies using the polar or longitudinal MOKE are far more common and overall preferred by the research community due to the fact that polarization measurements allow for more sensitive detection, even if transverse MOKE (T-MOKE) experiments are simpler given that they are easily-operated light intensity measurements.
For many applications, it is important to enhance the magneto-optical response and, for this reason, numerous studies have been conducted in order to find ways to enhance the magneto-optical effects. This is especially significant for T-MOKE applications because of its simple operation, although T-MOKE measurements tend to produce rather weak signal amplitudes compared to the longitudinal (L-MOKE) and especially the polar P-MOKE.
The scientific paper “Ultrasensitive T-MOKE measurements by means of effective polarization change detection”, by E. Oblak et al. (Journal of Physics D: Appl. Phys. 50 (2017), 23LT01), reports two experimental methods. The first method is a direct intensity T-MOKE measurement scheme in which only p-polarized incoming light is used and light intensity changes are monitored as the magnetic field is altered and causes a reversal of the sample magnetization. The second method is a polarization detection scheme, for mixed s-polarized and p-polarized incoming light, that measures the magnetization state induced effective change in polarization as a function of the applied field.
This paper further reports a big enhancement of the relative change in light intensity (ΔI/I) as measured with the second method by means of a suitable optical set-up, due to the fact that a large proportion of the reflected light that does not carry T-MOKE information is separated by the utilized polarization optics and is not detected.
However, the paper also discloses that the performance of some elements of the experimental setup was not optimized due to other contradictory requirements, and it points out that further optimization can improve the detection threshold of T-MOKE signals. Furthermore, given that the sensitive detection of the T-MOKE effect described in the paper is based on one individual relative intensity measurement (ΔI/I), the method is susceptible to false positive signal identification if other aspects of the experimental set-up lead to a signal modification that is synchronous with the magnetic field variation.
In a first aspect, a method for extracting a T-MOKE signal is provided (in this context, to extract means to detect and measure). The method includes an ellipsometric measurement procedure upon a sample and employs an apparatus comprising a light source intended to emit a light beam that is to follow an optical path, the sample having a reflecting surface arranged to reflect, at least partially, the light beam in an optical plane of incidence. The apparatus further comprises:
The sample can be represented by a Jones reflection matrix like
where rs is the complex Fresnel reflection coefficient for s-polarization, rp is the complex Fresnel reflection coefficient for p-polarization and β is a complex coefficient that represents the component of light reflected on the reflecting surface due to the magnetic-field induced magnetization of the sample, whereby {tilde over (β)}=β/rp is a relative T-MOKE coefficient.
The method comprises the steps of:
The method thus proposes a polarization detection scheme to ascertain that a T-MOKE signal (and not a noise signal) is indeed detected and to measure it. This improvement is based on the realization that the sensitivity of the measurement scheme towards the T-MOKE signals depends on the precise orientation of the quarter-wave plate (angle φ) and of the second linear polarizer (angle θ) in a precise manner, so that, upon varying φ and θ in a well-defined way, a T-MOKE signal (and not any other signal but only a T-MOKE signal) will follow a precise pattern that can be predicted because the inventors have developed a mathematical solution of the shape of the real T-MOKE signals (function f). The detection configuration (φ, θ) is thus changed during a measurement sequence, making it possible to unambiguously isolate actual T-MOKE signals from noise signals.
In some examples, the relative T-MOKE coefficient {tilde over (β)} may be computed as a derived function of B1 and B2, for example {tilde over (β)}=B1+iB2.
In some examples, the other parameters (different from B1 or B2) may be related to the Fresnel reflection coefficients, or may represent optical or electronic imperfections in the apparatus or background noise.
In some examples, the function f may be:
where
2h1=cos2(2φ−θ)+cos2(θ),2h2=sin2(2φ−θ)+sin2(θ),4h3=sin(4φ−2θ)+sin(2θ),2h4=sin(2φ−2θ).
These formulas are valid for any angle α, i.e. for any incoming polarization that is not purely s-polarized or purely p-polarized. Actually, they are even valid for s-polarization or p-polarization, but in these extreme cases the B1 and B2 terms are zero and no T-MOKE signal is detected, only a noise signal is.
In the case of α=45°, the function f reduces to:
where
2h1=cos2(2φ−θ)+cos2(θ),2h2=sin2(2φ−θ)+sin2(θ),4h3=sin(4φ−2θ)+sin(2θ),2h4=sin(2φ−2θ).
Non-limiting examples of the present disclosure will be described in the following, with reference to the appended drawings, in which:
A sample 90 may be placed under the influence of the magnetic field generated by magnet 30, for example in a gap thereof. The sample 90 is provided with a reflecting surface 92. The reflecting surface 92 need not be fully reflective; for the present purpose, it is enough if the reflecting surface 92 is able to reflect a small portion of the light falling upon it.
The relative arrangement of the sample 90 and the magnet 30 may be such that the magnetic-field induced magnetization of the sample is perpendicular to the plane of incidence (the latter being defined by the normal to surface 92 and the light beam from the light source 10). Hence, this setup may be arranged to measure T-MOKE signals.
In operation, the light beam from the laser 10 first passes through the first linear polarizer 20 and is subsequently reflected by the reflecting surface 92 of the sample 90, which is magnetized by the magnetic field generated by the magnet 30. The reflected light beam then passes through the rotatable quarter-wave plate 40 and the rotatable second linear polarizer 50, after which the transmitted light intensity is measured with the photo-detector 60. The polarization axis of the light sent to the sample is set by angle α of the first linear polarizer. The measured signals reach a maximum when α is approximately 45°.
What is measured with this configuration is the light intensity I as a function of the applied magnetic field H. The light intensity I changes as the magnetization state of the sample changes. The observed intensity change ΔI in between inverted magnetization states is caused by T-MOKE. During the measurements, what is monitored is the fractional or relative intensity change ΔI/I upon magnetization reversal (driven by the reversal of the magnetic field), defined as:
The ragged gray lines in
An alignment process may be performed before conducting such ΔI/I measurements. In it, the quarter-wave plate 40 and the second linear polarizer 50 are rotated iteratively to minimize the light intensity at the photo-detector 60. This is useful because, for an arbitrary incoming linear polarization, the phase shift between the s-polarized and p-polarized reflected light components generally leads to an elliptical polarization state in reflection that is independent from magneto-optical effects. To compensate this purely optical ellipticity, the quarter-wave plate may be aligned in a way such that a purely linear polarization state is generated upon transmission through the quarter-wave plate. The final optical element prior to the photo-detector 60, i.e. the second linear polarizer 50, is then aligned in a way such that it is perpendicular to the linear polarization leaving the quarter-wave plate, resulting in the minimum transmission condition for the optical pair of quarter-wave plate 40 and linear polarizer 50. The actual ellipsometric measurement procedure is then executed for orientation pairs of elements 40 and 50 that are close to this minimum transmission condition, because this leads to large ΔI/I values, as well as to a characteristic interference in between optical and magneto-optical polarization effects (described by equation 8 below).
It is hard to detect actual T-MOKE signals when measuring ultra-small signals where background noise or false field induced signals (that are not magneto-optical in nature) are prevailing upon the smaller T-MOKE signals.
In order to be able to separate or distinguish the actual T-MOKE signal from non-magnetically induced signals, it is taken into account that, upon changing the orientation of the quarter-wave plate 40 (i.e. its angle φ, which is the angle between the quarter-wave plate axis and the s-polarization orientation) and the second polarizer 50 (i.e. its angle θ, which is the angle between the second polarizer axis and the s-polarization orientation), a real T-MOKE signal (and only a real T-MOKE signal) will follow a precise pattern that can be predicted. A mathematical solution has been derived for the fractional intensity changes ΔI/I at the photo-detector 60 due to magnetization reversal producing a true T-MOKE signal. This solution describes an exact signal pattern that is produced upon variation of φ and θ. The analyses are accomplished by fitting experimental data against the predicted T-MOKE signal pattern as a function of angles φ and θ. The data are recorded as ΔI/I measurements for a grid of preselected (φ, θ) values.
For every configuration, the detected light intensity I at the photo-detector is
I=ED·ED*, (2)
Where ED stands for the electric field vector at the photo-detector. ED can be determined via the Jones calculus as
ED=P2·QWP·R·E, (3)
where E is the electric field vector of the incoming light beam at the sample 90 (i.e. after the first linear polarizer 20), and P2 and QWP are the respective Jones matrices for the second linear polarizer 50 and the quarter-wave plate 40, and are given as
Since the focus here is in the transverse MOKE, and given the measurement geometry, the reflection matrix R for the sample under investigation can be written as
with β switching its sign upon magnetization reversal.
Finally, the electric field vector at the photo-detector ED can be derived via the matrix product
Given the above and assuming that α was set to 45° (whereby ES=EP in the incoming light), the mathematical solution for fractional intensity changes at the photo-detector ΔI/I due to magnetization reversal (due to applied field reversal) was derived as
B1 and B2 represent the magneto-optical effect of the sample and B3 and B4 represent the Fresnel reflection coefficients, but Eq. (8) also includes two corrective terms: B5 describes the fact that, even under minimum transmission conditions, the transmitted light intensity is not zero but has a non-vanishing value, namely B5, due to imperfections of the optical elements. B6 describes the fact that there might be a non-T-MOKE ΔI/I signal that can be separated because it does not have the same (φ, θ) dependence as a true T-MOKE signal. It is herein assumed a constant false or background ΔI/I signal, the amplitude of which is B6.
This derived solution was developed for angle α being set to 45 degrees. Nevertheless, the method works for any arbitrary incoming polarization that is not purely s-polarized or purely p-polarized. The general solution for any angle α is:
The ΔI/I signal and corresponding fit for a non-ferromagnetic Co0.68Ru0.32 sample are presented in
Although only a number of examples have been disclosed herein, other alternatives, modifications, uses and/or equivalents thereof are possible. Furthermore, all possible combinations of the described examples are also covered. Thus, the scope of the present disclosure should not be limited by particular examples, but should be determined only by a fair reading of the claims that follow. If reference signs related to drawings are placed in parentheses in a claim, they are solely for attempting to increase the intelligibility of the claim, and shall not be construed as limiting the scope of the claim.
For example, useful results can be obtained by considering just a subset (any subset) of {B1, B2, B3, B4, B5, B6}, e.g. only B1, so that it is not strictly necessary to always compute all of B1, B2, B3, B4, B5 and B6.
Number | Date | Country | Kind |
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19382328 | Apr 2019 | EP | regional |
Number | Name | Date | Kind |
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5631559 | Oliver | May 1997 | A |
6528993 | Shin | Mar 2003 | B1 |
6956660 | Meeks | Oct 2005 | B2 |
20050024049 | Schutzmann et al. | Feb 2005 | A1 |
20070165228 | Strocchia-Rivera | Jul 2007 | A1 |
Entry |
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International Search Report and Written Opinion in PCT/EP2020/061966, dated Jun. 4, 2020, 14 pages. |
Samuel R Bowden et Al.: “Optical Characterization of All-Magnetic NOT Gate Operation in Vortex Rings”, IEEE Transactions on Magnetics, IEEE Service Center, New York, NY, US, vol. 45, No. 12, 1, (Dec. 1, 2009), 7 pages. |
E. Oblak et Al.: “Ultrasensitive T-MOKE measurements by means of effective polarization change detection”, Journal of Physics D: Appl. Phys. 50 (2017), 6 pages. |
Number | Date | Country | |
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20220050147 A1 | Feb 2022 | US |
Number | Date | Country | |
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Parent | PCT/EP2020/061966 | Apr 2020 | US |
Child | 17514351 | US |