Number | Name | Date | Kind |
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4954189 | Hahn et al. | Sep 1990 | |
5051134 | Schnegg et al. | Sep 1991 | |
5238875 | Ogino | Aug 1993 | |
5340435 | Ito et al. | Aug 1994 | |
5478408 | Mitani et al. | Dec 1995 | |
5863829 | Nakayoshi et al. | Jan 1999 |
Number | Date | Country |
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8-274286 | Oct 1996 | JPX |
Entry |
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Nakayoshi et al. "Manufacture of laminated SOI substrate for semiconductor device" CA 126:68767, 1996. |