Number | Name | Date | Kind |
---|---|---|---|
3542551 | Rice | Nov 1970 | |
3551221 | Yanagawa | Dec 1970 | |
3560278 | Sanera | Feb 1971 | |
3793088 | Eckton | Feb 1974 | |
3920483 | Johnson et al. | Nov 1975 | |
3925105 | Sloan | Dec 1975 | |
3928081 | Marley et al. | Dec 1975 | |
3928082 | Schwettmann et al. | Dec 1975 | |
3933528 | Sloan | Jan 1976 |
Entry |
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Irving, S. M., "Plasma Oxidation . . . Photo Resist Films", Solid State Technology, June 1971, pp. 47-51. |
Berger et al., "Masking Process for Base and Isolation Diffusion", I.B.M. Tech. Discl. Bull., vol. 14, No. 5, Oct. 1971, pp. 1612-1613. |