Number | Name | Date | Kind |
---|---|---|---|
4343832 | Smith et al. | Aug 1982 | A |
5114876 | Weiner | May 1992 | A |
5126165 | Akihama et al. | Jun 1992 | A |
5130263 | Possin et al. | Jul 1992 | A |
5316969 | Ishida et al. | May 1994 | A |
5386798 | Lowndes et al. | Feb 1995 | A |
5604138 | Lee et al. | Feb 1997 | A |
5612235 | Wu et al. | Mar 1997 | A |
5696011 | Yamazaki et al. | Dec 1997 | A |
5817550 | Carey et al. | Oct 1998 | A |
5908307 | Talwar et al. | Jun 1999 | A |
5955759 | Ismail et al. | Sep 1999 | A |
5962195 | Yen et al. | Oct 1999 | A |
Entry |
---|
Kurt H. Weiner and Somit Talwar, “Self Aligned Silicide Formation Using Gas Immersion Laser Annealing (GILA)”, An Ultratech Stepper technical brief, Mar. 3, 1997. |
Kurt H. Weiner and Somit Talwar, “Ultrashallow Junction Formation Using Projection Gas Immersion Laser Doping (PGID)”, A Verdant Technologies technical brief, Aug. 20, 1997. |