Number | Date | Country | Kind |
---|---|---|---|
3615519 | May 1986 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4522681 | Gorowitz et al. | Jun 1985 | |
4584055 | Kayanuma et al. | Apr 1986 | |
4595453 | Yamazaki et al. | Jun 1986 | |
4666555 | Tsang | May 1987 | |
4680085 | Vijar et al. | Jul 1987 |
Entry |
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Bersin, Richard L., "A Survey of Plasma Etching Processes" Solid State Tech. May 1976. |
Chang "Selective Reactive Ion Etching of Silicon Dioxide" Solid State Technology, Apr. 1964, pp. 214 to 219. |
Choe et al., "Production RIE-1., Selective Dielectrics Etching" Solid State Technology, Apr. 1984, pp. 177 to 183. |
Lam Research, "Refining Etch Technology" Publication date unknown. |