This is a continuation/divisional of application Ser. No. 07/563,098, filed Aug. 3, 1990.
Number | Name | Date | Kind |
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4401691 | Young | Aug 1983 | |
4780424 | Holler et al. | Oct 1988 | |
4968641 | Kalnitsky et al. | Nov 1990 |
Entry |
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Kooi et al., "Formation if Silicon Nitride . . . Oxidized Silicon in NH.sub.3 Gas", Jnl. of Electrochemical, Soc., vol. 123, No. 7, pp. 1117-1120, 1976. |
Itsumi et al., "Identification and Elimination . . . Field Oxidation", Jnl. of Electrochemical Soc., vol. 129, No. 4, pp. 800-806, Apr. 1982. |
Shankoff et al., "Bird's Beak . . . Oxidation", Jnl. of Electrochemical Soc., vol. 127, No. 1, pp. 216-222, Jan. 1980. |
Number | Date | Country | |
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Parent | 563098 | Aug 1990 |