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H. A. Khoury, "Real-time Etch Plasma Monitor System", IBM Tech. Dis. Bulletin, vol. 250, No. 11A, Apr. 1983, pp. 5721-5723. |
W. R. Rozich, "Determining Trace . . . Plasma Etching System", IBM Tech. Dis. Bull., vol. 20, No. 3, p. 1021, Aug. 1977. |