Number | Date | Country | Kind |
---|---|---|---|
8921722 | Sep 1989 | GBX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/GB90/01391 | 9/7/1990 | 3/20/1992 | 3/20/1992 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO91/05284 | 4/18/1991 |
Number | Name | Date | Kind |
---|---|---|---|
4566935 | Hornbeck | Jan 1986 | |
4624741 | Daniele | Nov 1986 | |
4674180 | Zavtacky et al. | Jun 1987 | |
4783237 | Aine et al. | Nov 1988 | |
4805038 | SeLigson | Feb 1989 | |
4849070 | Bly et al. | Jul 1989 |
Number | Date | Country |
---|---|---|
0330105 | Aug 1989 | EPX |
Entry |
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International Electron Devices Meeting 1986, Los Angeles pp. 184-187; S. Sugiyama: "Micro-diaphragm pressure sensor". |