Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems

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H01H2001/0089

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HELECTRICITY H01Electric elements H01HELECTRIC SWITCHES RELAYS SELECTORS EMERGENCY PROTECTIVE DEVICES

Current Industry

H01H2001/0089Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing variable radio frequency micro-electromech...
- Patent number 12,249,468
- Issue date Mar 11, 2025
- Universite de Limoges
- Romain Stefanini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical switch with metamaterial contacts
- Patent number 10,784,066
- Issue date Sep 22, 2020
- Synergy Microwave Corporation
- Shiban K. Koul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Elimination of silicon residues from MEMS cavity floor
- Patent number 8,921,165
- Issue date Dec 30, 2014
- Cavendish Kinetics, Inc.
- Brian I. Troy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for implementation of a switching function in a microscale...
- Patent number 8,420,427
- Issue date Apr 16, 2013
- Wispry, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having electrothermal actuation and release and method...
- Patent number 8,264,054
- Issue date Sep 11, 2012
- Wispry, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High voltage switch and method of making
- Patent number 8,054,147
- Issue date Nov 8, 2011
- General Electric Company
- David Cecil Hays
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS piezoelectric switch
- Patent number 7,786,653
- Issue date Aug 31, 2010
- Northrop Grumman Systems Corporation
- Carl B. Freidhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a microelectromechanical system (MEMS) switch
- Patent number 7,657,995
- Issue date Feb 9, 2010
- International Business Machines Corporation
- Louis Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro electromechanical switch and method of manufacturing the same
- Patent number 7,463,126
- Issue date Dec 9, 2008
- Omron Corporation
- Takahiro Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-reliability micro-electro-mechanical system (MEMS) switch appa...
- Patent number 7,414,500
- Issue date Aug 19, 2008
- Hector J. De Los Santos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method of fabricating a hinge type MEMS switch
- Patent number 7,348,870
- Issue date Mar 25, 2008
- International Business Machines Corporation
- Louis C. Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEM switching device
- Patent number 7,317,232
- Issue date Jan 8, 2008
- Cabot Microelectronics Corporation
- Heinz H. Busta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trilayered beam MEMS device and related methods
- Patent number 6,917,086
- Issue date Jul 12, 2005
- Turnstone Systems, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrothermal self-latching MEMS switch and method
- Patent number 6,882,264
- Issue date Apr 19, 2005
- Wispry, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a trilayered beam and related methods
- Patent number 6,876,047
- Issue date Apr 5, 2005
- Turnstone Systems, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having contact and standoff bumps and related methods
- Patent number 6,876,482
- Issue date Apr 5, 2005
- Turnstone Systems, Inc.
- Dana Richard DeReus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-scale interconnect device with internal heat spreader and met...
- Patent number 6,847,114
- Issue date Jan 25, 2005
- Turnstone Systems, Inc.
- Subham Sett
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical switch having a conductive compressible ele...
- Patent number 6,836,029
- Issue date Dec 28, 2004
- International Business Machines Corporation
- David R. Greenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having flexures with non-linear restoring force
- Patent number 6,806,545
- Issue date Oct 19, 2004
- Samsung Electronics Co., Ltd.
- Dong-ha Shim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microswitch and method of manufacturing the same
- Patent number 6,753,488
- Issue date Jun 22, 2004
- Kabushiki Kaisha Toshiba
- Tomio Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trilayered beam MEMS device and related methods
- Patent number 6,746,891
- Issue date Jun 8, 2004
- Turnstone Systems, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-switching device actuated by low voltage
- Patent number 6,700,465
- Issue date Mar 2, 2004
- Samsung Electronics Co., Ltd.
- Jin-woo Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device adapted to pull a cantilever away from a contact structure
- Patent number 6,646,215
- Issue date Nov 11, 2003
- Teravicin Technologies, Inc.
- Richard D. Nelson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical RF switch
- Patent number 6,639,494
- Issue date Oct 28, 2003
- Northrop Grumman Corporation
- Nathan Bluzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic microrelay
- Patent number 6,486,425
- Issue date Nov 26, 2002
- Omron Corporation
- Tomonori Seki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro-electromechanical switch
- Patent number 6,307,169
- Issue date Oct 23, 2001
- Motorola Inc.
- Xi-Qing Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making micromechanical switch
- Patent number 5,262,000
- Issue date Nov 16, 1993
- British Telecommunications public limited company
- Anthony D. Welbourn
- G02 - OPTICS
Information Patent Grant
Thin film orthogonal microsensor for air flow and method
- Patent number 4,914,742
- Issue date Apr 3, 1990
- Honeywell Inc.
- Robert E. Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Method for making thin film orthogonal microsensor for air flow
- Patent number 4,895,616
- Issue date Jan 23, 1990
- Honeywell Inc.
- Robert E. Higashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH
- Publication number 20220199333
- Publication date Jun 23, 2022
- Universite De Limoges
- Romain Stefanini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH
- Publication number 20200321166
- Publication date Oct 8, 2020
- Universite De Limoges
- Romain Stefanini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION
- Publication number 20190066937
- Publication date Feb 28, 2019
- Innovative Micro Technology
- Christopher S. GUDEMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL SWITCH WITH METAMATERIAL CONTACTS
- Publication number 20180261415
- Publication date Sep 13, 2018
- Synergy Microwave Corporation
- Shiban K. Koul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR
- Publication number 20130032453
- Publication date Feb 7, 2013
- CAVENDISH KINETICS INC.
- Brian I. Troy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH VOLTAGE SWITCH AND METHOD OF MAKING
- Publication number 20100252403
- Publication date Oct 7, 2010
- GENERAL ELECTRIC COMPANY
- David Cecil Hays
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS PIEZOELECTRIC SWITCH
- Publication number 20090009030
- Publication date Jan 8, 2009
- NORTHROP GRUMMAN SYSTEMS CORPORATION
- Carl B. Freidhoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEM switching device and method for making same
- Publication number 20080093691
- Publication date Apr 24, 2008
- Cabot Microelectronics Corporation
- Heinz H. Busta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD OF FABRICATING A HINGE TYPE MEMS SWITCH
- Publication number 20080014663
- Publication date Jan 17, 2008
- International Business Machines Corporation
- Louis Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for implementation of a switching function in a microscale...
- Publication number 20070158775
- Publication date Jul 12, 2007
- Wispry, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro electromechanical switch and method of manufacturing the same
- Publication number 20060208837
- Publication date Sep 21, 2006
- Omron Corporation
- Takahiro Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD OF FABRICATING A HINGE TYPE MEMS SWITCH
- Publication number 20060145792
- Publication date Jul 6, 2006
- International Business Machines Corporation
- Louis C. Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-reliability micro-electro-mechanical system (MEMS) switch appa...
- Publication number 20050178646
- Publication date Aug 18, 2005
- Hector J. De Los Santos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEM switching device and method for making same
- Publication number 20050040484
- Publication date Feb 24, 2005
- Heinz H. Busta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micro-scale interconnect device with internal heat spreader and met...
- Publication number 20040197960
- Publication date Oct 7, 2004
- Subham Sett
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Trilayered beam MEMS device and related methods
- Publication number 20040188785
- Publication date Sep 30, 2004
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSWITCH AND METHOD OF MANUFACTURING THE SAME
- Publication number 20040075514
- Publication date Apr 22, 2004
- Tomio Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS device having electrothermal actuation and release and method...
- Publication number 20040012298
- Publication date Jan 22, 2004
- Coventor, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrothermal self-latching MEMS switch and method
- Publication number 20030117257
- Publication date Jun 26, 2003
- Coventor, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS device having contact and standoff bumps and related methods
- Publication number 20030116417
- Publication date Jun 26, 2003
- Coventor, Inc.
- Dana Richard DeReus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Trilayered beam MEMS device and related methods
- Publication number 20030119221
- Publication date Jun 26, 2003
- Coventor, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-scale interconnect device with internal heat spreader and met...
- Publication number 20030116851
- Publication date Jun 26, 2003
- Coventor, Inc.
- Subham Sett
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS device having a trilayered beam and related methods
- Publication number 20030116848
- Publication date Jun 26, 2003
- Coventor, Inc.
- Shawn Jay Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-electromechanical switch having a conductive compressible ele...
- Publication number 20030098618
- Publication date May 29, 2003
- International Business Machines Corporation
- David R. Greenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-switching device actuated by low voltage
- Publication number 20030099081
- Publication date May 29, 2003
- SAMSUNG ELECTRONICS CO., LTD.
- Jin-Woo Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS device having flexures with non-linear restoring force
- Publication number 20020149071
- Publication date Oct 17, 2002
- SAMSUNG ELECTRONICS CO., LTD.
- Dong-Ha Shim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Radio device and measuring device utilizing electrostatic microrela...
- Publication number 20020005341
- Publication date Jan 17, 2002
- Tomonori Seki
- H01 - BASIC ELECTRIC ELEMENTS

Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing variable radio frequency micro-electromech...

Microelectromechanical switch with metamaterial contacts

Elimination of silicon residues from MEMS cavity floor

Methods for implementation of a switching function in a microscale...

MEMS device having electrothermal actuation and release and method...

High voltage switch and method of making

MEMS piezoelectric switch

Method of fabricating a microelectromechanical system (MEMS) switch

Micro electromechanical switch and method of manufacturing the same

High-reliability micro-electro-mechanical system (MEMS) switch appa...

Structure and method of fabricating a hinge type MEMS switch

MEM switching device

Trilayered beam MEMS device and related methods

Electrothermal self-latching MEMS switch and method

MEMS device having a trilayered beam and related methods

MEMS device having contact and standoff bumps and related methods

Micro-scale interconnect device with internal heat spreader and met...

Micro-electromechanical switch having a conductive compressible ele...

MEMS device having flexures with non-linear restoring force

Microswitch and method of manufacturing the same

Trilayered beam MEMS device and related methods

Micro-switching device actuated by low voltage

Device adapted to pull a cantilever away from a contact structure

Microelectromechanical RF switch

Electrostatic microrelay

Micro-electromechanical switch

Method for making micromechanical switch

Thin film orthogonal microsensor for air flow and method

Method for making thin film orthogonal microsensor for air flow

Patents Applicationslast 30 patents

VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH

VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH

MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION

MICROELECTROMECHANICAL SWITCH WITH METAMATERIAL CONTACTS

ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR

HIGH VOLTAGE SWITCH AND METHOD OF MAKING

MEMS PIEZOELECTRIC SWITCH

MEM switching device and method for making same

STRUCTURE AND METHOD OF FABRICATING A HINGE TYPE MEMS SWITCH

Methods for implementation of a switching function in a microscale...

Micro electromechanical switch and method of manufacturing the same

STRUCTURE AND METHOD OF FABRICATING A HINGE TYPE MEMS SWITCH

High-reliability micro-electro-mechanical system (MEMS) switch appa...

MEM switching device and method for making same

Micro-scale interconnect device with internal heat spreader and met...

Trilayered beam MEMS device and related methods

MICROSWITCH AND METHOD OF MANUFACTURING THE SAME

MEMS device having electrothermal actuation and release and method...

Electrothermal self-latching MEMS switch and method

MEMS device having contact and standoff bumps and related methods

Trilayered beam MEMS device and related methods

Micro-scale interconnect device with internal heat spreader and met...

MEMS device having a trilayered beam and related methods

Micro-electromechanical switch having a conductive compressible ele...

Micro-switching device actuated by low voltage

MEMS device having flexures with non-linear restoring force

Radio device and measuring device utilizing electrostatic microrela...