Patent Grant
11661336
This application claims priority to French Patent Application No. 2009921, filed Sep. 29, 2020, the entire content of which is incorporated herein by reference in its entirety.
The technical field of the invention is that of MEMS (microelectromechanical system) or NEMS (nanoelectromechanical system) type devices. The invention more particularly relates to a method for manufacturing an electroacoustic transducer comprising a device for transmitting a movement and a force between two zones isolated from each other in a sealed manner. Such an electroacoustic transducer may be employed as microphone or loudspeaker.
Microelectromechanical or nanoelectromechanical microphones represent a rapidly expanding market, notably thanks to the development of mobile devices, such as tablets, smartphones and other connected objects, in which they are replacing little by little electret microphones.
Microphones measure a rapid variation in atmospheric pressure, also called acoustic pressure. They thus comprise at least one portion in contact with the exterior.
Most MEMS or NEMS microphones currently manufactured are capacitive detection microphones. The patent application FR3059659 describes an example of capacitive detection microphone comprising a moveable element, capacitive detection means and a device for transmitting a movement between the moveable element and the capacitive detection means.
The moveable element is capable of collecting the variation in pressure. It may be formed by a rigid piston comprising a membrane, also called thin layer, and a structure for rigidifying the membrane. The membrane forms a separation between a cavity open onto the external environment and a rear volume of the microphone, also called reference volume because a reference pressure reigns therein. Thus, a face of the membrane is subjected to the reference pressure and an opposite face of the membrane is subjected to atmospheric pressure (of which it is wished to detect the variation). The moveable element is connected to the movement transmitting device in a first zone of the microphone.
The capacitive detection means make it possible to measure the displacement of the piston, and thus the variation in pressure. They are arranged in a second zone isolated from the first zone in a sealed manner. They comprise a moveable electrode and at least one fixed electrode arranged opposite the moveable electrode. The electrodes form the armatures of a capacitor, the capacitance of which varies as a function of the displacement of the piston. The second zone is chamber under a controlled atmosphere (typically under vacuum) to reduce phenomena of viscous friction and associated noises.
The transmitting device comprises at least one first transmission arm extending into the first zone and at least one second transmission arm extending into the second zone. The piston is coupled to a first end of the first transmission arm, whereas the moveable electrode of the capacitive detection means is coupled to an end of the second transmission arm. The first and second transmission arms are connected to their second end through a pivot articulation. This pivot articulation authorises a rotation of the transmission arms with respect to the frame of the microphone and simultaneously ensures the seal between the first and second zones.
The manufacture of such a microphone notably comprises a step of trimming the piston and a step of delimiting the transmission arms, in order to make them moveable with respect to the frame. These steps are difficult to implement without piercing the piston and creating important air leakages between the cavity subjected to atmospheric pressure and the rear volume of the microphone (subjected to the reference pressure).
More generally, there exists a need to manufacture an electroacoustic transducer while limiting air leakages between the different volumes of the electroacoustic transducer, the electroacoustic transducer comprising:
According to a first aspect of the invention, this need tends to be satisfied by providing a manufacturing method comprising the following steps:
The second portion of the second sacrificial layer, encapsulated in the structure for rigidifying the membrane, serves as protective layer or shield against the etching of the rigidification structure during the step of etching the substrate. Thus, the creation of (supplementary) air leakages through the moveable element or piston is prevented.
Thanks to the second portion of the second sacrificial layer, it is further possible to reduce the overlap distance between the substrate and the rigidification structure, thereby decreasing the phenomenon of squeeze-film damping responsible for mechanical noise.
In an embodiment, the second portion of the second sacrificial layer extends around the membrane of the moveable element, over more than 80% of the periphery of the moveable element, and beneficially all around the membrane of the moveable element.
In an embodiment of the manufacturing method, the second sacrificial layer further comprises a third portion disjointed from the first and second portions, the third portion of the second sacrificial layer is arranged so as to be encapsulated by a remaining portion of the second structural layer after the step of etching the second structural layer and the third portion of the second sacrificial layer also serves as stop layer during the step of etching the substrate.
The third portion of the second sacrificial layer is beneficially situated in the vicinity of an intersection between the position of the first transmission arm and the periphery of the rigidification structure.
The manufacturing method may further comprise, after the step of etching the first and second sacrificial layers and before the step of etching the substrate, the following steps:
Apart from the characteristics that have been mentioned in the preceding paragraphs, the manufacturing method according to the invention may have one or more complementary characteristics among the following, considered individually or according to all technically possible combinations thereof:
A second aspect of the invention relates to an electroacoustic transducer comprising:
In an embodiment, the transducer comprises a device for transmitting a movement and a force between a first zone and a second zone with a controlled atmosphere, the first and second zones being isolated from each other in a sealed manner, the transmitting device comprising, apart from the first transmission arm which extends into the first zone, a second transmission arm extending into the second zone.
The invention and the applications thereof will be better understood on reading the description that follows and by examining the figures that accompany it.
Other characteristics and benefits of the invention will become clear from the description that is given thereof below, for indicative purposes and in no way limiting, with reference to the appended figures, among which:
For greater clarity, identical or similar elements are marked by identical reference signs in all of the figures.
The electroacoustic transducer 1 comprises a frame (not represented) delimiting at least in part a first zone 11 and a second zone 12, an element 13 moveable with respect to the frame and a device 14 for transmitting a movement between the first zone 11 and the second zone 12. The first and second zones 11-12 of the electroacoustic transducer 1 are subjected to different pressures. They are isolated from each other in a sealed manner.
The moveable element 13, hereafter called piston, is in contact with the first zone 11. It comprises a membrane 131 and a structure 132 for rigidifying the membrane, also called skeleton or armature. The membrane 131 of the piston 13 here has the role of collecting over its entire surface a difference in pressure between its two faces, to deduce therefrom a variation in atmospheric pressure.
The membrane 131 of the piston 13 delimits in part a so-called closed reference volume, where a reference pressure reigns. It separates this reference volume from a cavity open to the external environment, here the air. A face of the membrane 131 is thus subjected to the reference pressure and an opposite face of the membrane 131 is subjected to atmospheric pressure (of which it is wished to detect the variation in the case of a microphone).
The first zone 11 may correspond to the cavity open to the external environment, and thus be subjected to atmospheric pressure. Alternatively, the first zone 11 may be the reference volume subjected to the reference pressure.
Further, in this particular example, the electroacoustic transducer 1 comprises a capacitive detection device 15 arranged in the second zone 12. The capacitive detection device 15 makes it possible to measure the displacement of the piston 13, and thus the difference in pressure between its two faces. It desirably comprises a moveable electrode 151 and at least one fixed electrode arranged opposite the moveable electrode 151. The electrodes form the armatures of a capacitor, the capacitance of which varies as a function of the displacement of the piston 13.
The second zone 12 is a controlled atmosphere chamber to reduce phenomena of viscous friction and associated acoustic noises. “Controlled atmosphere chamber” is taken to mean a chamber under reduced pressure, typically less than 10 mbar, and desirably under vacuum.
The transmitting device 14 is mounted rotationally moveable with respect to the frame, by means of one or more pivot articulations 16. The transmitting device 14 comprises at least one first transmission arm 141 extending into the first zone 11, at least one second transmission arm 142 extending into the second zone 12 and at least one transmission shaft 143 extending in part into the first zone 11 and in part into the second zone 12. In the example of
Each first transmission arm 141 comprises a first end coupled to the piston 13 and a second opposite end, coupled to the associated transmission shaft 143. Each second transmission arm 142 comprises a first end coupled to the moveable electrode 151 of the capacitive detection device 15 and a second opposite end, coupled to the associated transmission shaft 143.
The transmission shaft 143 is for example of straight cylinder shape. The transmission arms 141-142 desirably have the shape of a beam of rectangular section, with one dimension (length) much greater than the others (width and thickness). The piston 13 has for example a rectangular shape. The first transmission arms 141 desirably extend perpendicularly to a side of the piston 13, beneficially a large side. They may be anchored inside the periphery of the piston 13, as is represented by
Each pivot articulation 16 desirably comprises a sealed isolation element 161, traversed by a transmission shaft 143, and two aligned blades 162, which extend between the transmission shaft 143 and the frame. The sealed isolation element 161 is for example in the form of a sealing membrane. It ensures the sealing between the first zone 11 and the second zone 12 at the level of the pivot articulation 16. The blades 162 are dimensioned so as to be able to deform torsionally and enable the rotation of the transmitting device 14. They are desirably arranged in a diametrically opposite manner with respect to the transmission shaft 143. In an embodiment, the sealed isolation element 161 is such that it also deforms under the effect of the rotational displacement of the transmitting device 14.
The frame may notably comprise a support (formed by a first substrate), a structural layer (for example made of silicon) arranged on the support and a cover transferred onto the structural layer (for example formed by a second substrate).
The structure 132 for rigidifying the membrane of the piston 13 beneficially comprises at its periphery an edge which extends in a direction perpendicular to the membrane 131. This edge increases the air path around the piston and reduces leakages between the external environment and the closed volume serving as reference.
The substrate 21 serves notably to produce the first transmission arm 141 and a portion of the frame (the support). It initially has a thickness that may be comprised between 500 μm and 700 μm. The substrate 21 may be made of a semiconductor material, for example silicon.
The first structural layer 23 serves to produce the membrane 131 of the piston 13. It may also serve to produce the sealing membrane 161 of the pivot articulation 16 and/or the moveable electrode 151 of the capacitive detection device 15. It has a thickness less than that of the substrate 21, desirably comprised between 100 nm and 10 μm, for example equal to 1 μm. It is desirably constituted of the same material as the substrate, for example silicon.
The first sacrificial layer 22 is meant to disappear in part during the production of the transducer. This layer is notably useful for delimiting the first transmission arm 141. It may also serve as lower air gap in the capacitive detection zone of the transducer. It may also make it possible to mechanically connect the substrate and the first structural layer. The first sacrificial layer 21 may be constituted of a dielectric material, desirably a silicon nitride or a silicon oxide, for example silicon dioxide (SiO2). Its thickness is for example comprised between 100 nm and 10 μm.
The stack 20 may notably be a multilayer structure of SOI (Silicon On Insulator) type, commonly called SOI substrate.
Although not represented by the figures, the manufacturing method may next comprise a step of etching of the first structural layer 23. This step of etching of the first structural layer 23 may notably serve to form holes for releasing the moveable electrode 151 (to allow the etching solution of the first sacrificial layer 22 to infiltrate later).
The second sacrificial layer 24 may serve as upper air gap for the capacitive detection. The etching of the second sacrificial layer 24 may lead to the etching of the first sacrificial layer 22, in the place where the first structural layer 23 has previously been etched (not represented in the figures).
Thus, at the bottom of the trench corresponding to the periphery of the rigidification structure 132, the first structural layer 23 has been etched and the first sacrificial layer 22 is exposed.
At the end of step S4, the first structural layer 23 comprises a first portion 23a and a second portion 23b separated from each other. The first portion 23a of the first structural layer 23 (on the left of
The etching technique employed at step S4 of
The etching of the second sacrificial layer 24 is desirably an isotropic etching selective with respect to the substrate 21, to the first structural layer 23 and to the second structural layer 25. The second sacrificial layer 24 is desirably etched chemically, for example by immersing the stack in a hydrofluoric (HF) acid bath in liquid or vapour phase (in the case of a layer made of silicon oxide) for a controlled time.
On the other hand, a portion of the first sacrificial layer 22 situated in line with the periphery of the rigidification structure 132 is etched at the same time as the second sacrificial layer 24, which forms a cavity 22′ in the first sacrificial layer 22. The etching may be time controlled such that this cavity 22′ is not very extended.
The etching of the sacrificial layers 22 and 24 may also serve to release the moveable electrode 151 of the capacitive detection device 15 (before it is enclosed in the controlled atmosphere chamber).
Although not represented by the figures, the manufacturing method may next comprise a step of transfer of a cover onto the second structural layer 25, thereby forming the controlled atmosphere chamber, that is to say the second zone 12. The cover may be produced by machining a silicon substrate. It may notably be fixed to the second structural layer 25 by direct bonding (for example Si—Si) or by eutectic sealing (for example Au—Si).
As is illustrated in
Finally, at step S8 (cf.
The etching of the first sacrificial layer 22 is desirably an isotropic etching selective with respect to the substrate 21, to the first structural layer 23 and to the second structural layer 25. The first sacrificial layer 22 is desirably etched chemically, for example by immersing the assembly in a hydrofluoric (HF) acid bath in liquid or vapour phase (in the case of a layer made of silicon oxide) for a controlled time.
The first region 31 situated at the periphery of the rigidification structure 132 is that represented in transversal section by
This figure shows that the vertical projection (i.e. perpendicular to the substrate) of the first transmission arm 141 traverses the periphery of the rigidification structure 132 of the piston 13. Yet, to the vertical of this periphery is found the cavity 22′ formed by etching of the first sacrificial layer 22.
Thus, in a second region 32 of the stack around an intersection between the projection (or the position) of the first transmission arm 141 and the periphery of the rigidification structure 132, the etching of the substrate 21 coincides with the etching (undergone) of the first sacrificial layer 22. The first sacrificial layer 22 can thus no longer serve as stop layer to the etching of the substrate 21. This etching is not interrupted and extends into the first structural layer 23 and into the second structural layer 25. Such a phenomenon is problematic because it creates important air leakages between the first zone 11 situated on one side of the first structural layer 23 and the volume situated on the opposite side of the first structural layer 23 (here under the cover 26). This leakage problem is posed naturally at each first transmission arm 141, when the transmitting device has several thereof.
Furthermore, during the displacement of the piston 13, air is squeezed between the rigidification structure 132 and the remaining portion of the substrate 21, and this is so over almost the entire periphery of the piston 13 (cf.
The first portion 24a and the second portion 24b of the second sacrificial layer 24 are spaced apart from each other, such that the second structural layer 25 deposited later (and intended to form the rigidification structure 132) is in contact with the first structural layer 23 (intended to form the membrane 131).
The first and second portions 24a-24b of the second sacrificial layer 24 are desirably formed by etching of a dielectric layer deposited beforehand on the first structural layer 23, the etching being selective with respect to the first structural layer 23. The deposition may be conformal, such that the first and second portions 24a-24b have the same thickness. Conversely, the deposition may be planarizing if it is followed by a chemical mechanical polishing.
As described previously with reference to
An alternative consists in etching the second structural layer 25 and the first structural layer 23 separately, using different etching chemistries, when the two layers are formed of different materials.
Since the second portion 24b of the second sacrificial layer 24 is surrounded by the material of the first structural layer 23 and the material of the second structural layer 25, it is not affected by the etching.
The cavity 22′ extends under the second portion 24b of the second sacrificial layer 24, without however going beyond. The etching is in fact time controlled such that the lateral end of the cavity 22′ is situated in line with the second portion 24b.
Since the etching of the substrate 21 is selective with respect to the material of the first sacrificial layer 22 and to the material of the second sacrificial layer 24, the etching does not propagate either to the membrane 131, or to the rigidification structure 132. Indeed, the first sacrificial layer 22 and the second portion 24b of the second sacrificial layer 24 serve as stop layers to the etching (the second portion 24b of the second sacrificial layer 24 is revealed by the etching of a portion of the first structural layer 23, not protected by the first sacrificial layer 22).
Thus, the second portion 24b of the second sacrificial layer 24 makes it possible not only to limit leakages on either side of the piston, while serving as shield during the etching of the substrate 21, but also to reduce the distance d over which the substrate 21 and the rigidification structure 132 are superimposed. The phenomenon of squeeze-film damping is then reduced with respect to the configuration of
The substrate 21 is beneficially etched in such a way that it is superimposed in part with the second portion 24b of the second sacrificial layer 24 after etching. Thus, the edge of the rigidification structure 132 is not cut down.
The manufacturing method is completed by step S8 of etching the first sacrificial layer 22, as described in relation with
This figure shows that the second portion 24b of the second sacrificial layer 24 is situated under the rigidification structure 132 and may extend around the membrane 131, over a large part of the periphery of the piston 13, typically more than 80% of the periphery of the piston 13, and desirably more than 90%. In an embodiment, the second portion 24b is situated all around the membrane 131. Indeed, the cavity 22′ formed in the first sacrificial layer 22 extends along the periphery of the rigidification structure 132. It is thus desirable to protect the rigidification structure 132 over the entire perimeter of the piston 13, in order to minimise leakages.
When the second portion 24b of the second sacrificial layer 24 does not extend all around the membrane (for example over 80% of the periphery), the membrane 131 may only be released completely at the end of step S8 of etching of the first sacrificial layer 22. Indeed, a portion of the first sacrificial layer 22 may connect the membrane 131 to the substrate 21, as illustrated by
In an embodiment of the manufacturing method, represented by
With reference to
The third portion 24c of the second sacrificial layer 24 is thus encapsulated by the remaining portion of the second structural layer 25, in the vicinity of the crossover between the first transmission arm 141 and the periphery of the rigidification structure 132 (in other words in the second region 32 of the stack, cf.
As is represented in
The method for manufacturing the electroacoustic transducer according to the invention has been described in taking for example a capacitive detection microphone (
More generally, a microphone comprises in the second zone 12 (controlled atmosphere chamber) a device for measuring a movement of the transmitting device and/or a force applied to the transmitting device. This measurement device comprises for example a vibrating beam (resonant detection microphone).
In the case of a loudspeaker or an ultrasound emitter, an actuator (for example capacitive) replaces the measuring means in the second zone 22. The actuator moves the first end of the second transmission arm 142. This movement is transmitted by the transmitting device 14 to the piston 13 integral with the first end of the first transmission arm 141. The movement of the membrane 131 of the piston 13 makes it possible to emit a sound (or ultrasounds).
| Number | Date | Country | Kind |
|---|---|---|---|
| 2009921 | Sep 2020 | FR | national |
| Number | Name | Date | Kind |
|---|---|---|---|
| 7578190 | Lin | Aug 2009 | B2 |
| 10257615 | Joet | Apr 2019 | B2 |
| 10807858 | Joet | Oct 2020 | B2 |
| 11337016 | Joet | May 2022 | B2 |
| 20130000411 | Robert | Jan 2013 | A1 |
| 20140060169 | McNeil | Mar 2014 | A1 |
| 20200216305 | Rizzini | Jul 2020 | A1 |
| 20210292158 | Dagher | Sep 2021 | A1 |
| 20220098032 | Joet | Mar 2022 | A1 |
| Number | Date | Country |
|---|---|---|
| 2 541 222 | Jan 2013 | EP |
| 3 070 963 | Sep 2016 | EP |
| 3 557 881 | Oct 2019 | EP |
| 3 059 659 | Jun 2018 | FR |
| Entry |
|---|
| Search Report as issued in French Patent Application No. 2009921, dated Jun. 14, 2021. |
| Number | Date | Country | |
|---|---|---|---|
| 20220098031 A1 | Mar 2022 | US |
