Diaphragms, membranes

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CPC
B81C1/00158

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00158Diaphragms, membranes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electromechanical microsystem
- Patent number 12,162,748
- Issue date Dec 10, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Laurent Mollard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,134,557
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sensing a motion of a deflective surface
- Patent number 12,133,050
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method of producing a microstructure
- Patent number 12,071,341
- Issue date Aug 27, 2024
- ams International AG
- Peter Heeb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
- Patent number 12,070,773
- Issue date Aug 27, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device structure with movable membrane
- Patent number 12,043,538
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
- Patent number 12,043,537
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
- Patent number 12,044,585
- Issue date Jul 23, 2024
- United States Government Administrator of NASA
- Robert S. Okojie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and preparation method therefor
- Patent number 12,022,270
- Issue date Jun 25, 2024
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,012,326
- Issue date Jun 18, 2024
- TDK ELECTRONICS AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical microsystem
- Patent number 11,999,613
- Issue date Jun 4, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Laurent Mollard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane-based nano-electromechanical systems device and methods to...
- Patent number 12,000,908
- Issue date Jun 4, 2024
- BRANE AUDIO, LLC
- Alexander Joseph Pinkerton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,975,965
- Issue date May 7, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having uniform contacts
- Patent number 11,964,866
- Issue date Apr 23, 2024
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device
- Patent number 11,952,264
- Issue date Apr 9, 2024
- Merry Electronics (Shenzhen) Co., Ltd.
- Jia Yin Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a device comprising a membrane extending o...
- Patent number 11,939,214
- Issue date Mar 26, 2024
- Soitec
- Bruno Ghyselen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound producing cell and manufacturing method thereof
- Patent number 11,943,595
- Issue date Mar 26, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a pressure sensor device
- Patent number 11,932,532
- Issue date Mar 19, 2024
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 11,932,533
- Issue date Mar 19, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for manufacturing a micromecha...
- Patent number 11,912,563
- Issue date Feb 27, 2024
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a micromechanical component
- Patent number 11,905,166
- Issue date Feb 20, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual membrane transducer
- Patent number 11,905,167
- Issue date Feb 20, 2024
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic transducer, manufacturing method thereof, and ultrasonic...
- Patent number 11,904,356
- Issue date Feb 20, 2024
- Hitachi, Ltd.
- Taiichi Takezaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 11,897,761
- Issue date Feb 13, 2024
- Amkor Technology Singapore Holding Pte Ltd.
- Ki Yeul Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
- Patent number 11,890,643
- Issue date Feb 6, 2024
- Vanguard International Semiconductor Corporation
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
- Patent number 11,833,542
- Issue date Dec 5, 2023
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 11,807,521
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 11,806,747
- Issue date Nov 7, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240416385
- Publication date Dec 19, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PRESSURE DIAPHRAGMS
- Publication number 20240417243
- Publication date Dec 19, 2024
- Edwards Lifesciences Corporation
- Alexander H. Siemons
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240383744
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING IMPROVED SIGNAL DISTOR...
- Publication number 20240375938
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
- Publication number 20240381034
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...
- Publication number 20240359970
- Publication date Oct 31, 2024
- MITSUMI ELECTRIC CO., LTD.
- Hisanori AGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVE MATRIX PROGRAMMABLE MIRROR
- Publication number 20240359974
- Publication date Oct 31, 2024
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE
- Publication number 20240343551
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DIAPHRAGM SYSTEM
- Publication number 20240343557
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERPOSER FOR DAMPING MEMS MICROPHONES
- Publication number 20240279049
- Publication date Aug 22, 2024
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
- Publication number 20240253976
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240190700
- Publication date Jun 13, 2024
- Amkor Technology Singapore Holding Pte. Ltd.
- Ki Yeul YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS LOUDSPEAKER MANUFACTURING METHOD AND MEMS LOUDSPEAKER
- Publication number 20240174513
- Publication date May 30, 2024
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Qiang Dan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE
- Publication number 20240174514
- Publication date May 30, 2024
- INFINEON TECHNOLOGIES AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
- Publication number 20240158224
- Publication date May 16, 2024
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
- Publication number 20240109770
- Publication date Apr 4, 2024
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
- Publication number 20240100565
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SOUND PRODUCING CELL
- Publication number 20240031740
- Publication date Jan 25, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
- Publication number 20240024917
- Publication date Jan 25, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
- Publication number 20240022859
- Publication date Jan 18, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240017988
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LASER SEALING AND SURFACE ASPERITY CONTROLLING METHOD WITH DISCONTI...
- Publication number 20240017353
- Publication date Jan 18, 2024
- ROBERT BOSCH GmbH
- Bo CHENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEMS RESONATOR
- Publication number 20230416081
- Publication date Dec 28, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
- Publication number 20230406692
- Publication date Dec 21, 2023
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE TRANSFER METHOD
- Publication number 20230406696
- Publication date Dec 21, 2023
- SOITEC
- François-Xavier Darras
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
- Publication number 20230382715
- Publication date Nov 30, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
- Publication number 20230373781
- Publication date Nov 23, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Jan Rockstroh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
- Publication number 20230365396
- Publication date Nov 16, 2023
- TDK Corporation
- Toyotaka KOBAYASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...
- Publication number 20230370783
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Diaphragms, membranes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electromechanical microsystem

CMUT transducer with motion-stopping structure and CMUT transducer...

Pressure sensor with high stability

Arched membrane structure for MEMS device

Device for sensing a motion of a deflective surface

Microstructure and method of producing a microstructure

Adaptive cavity thickness control for micromachined ultrasonic tran...

Semiconductor device structure with movable membrane

Method of manufacturing a microelectromechanical systems (MEMS) device

On-chip integrated silicon carbide pressure and temperature sensors

MEMS microphone and preparation method therefor

Microelectromechanical microphone with membrane trench reinforcemen...

Electromechanical microsystem

Membrane-based nano-electromechanical systems device and methods to...

MEMS resonator

MEMS device having uniform contacts

Electronic device

Method for manufacturing a device comprising a membrane extending o...

Sound producing cell and manufacturing method thereof

Micromechanical component for a pressure sensor device

Signal processing circuit for triple-membrane MEMS device

Micromechanical component and method for manufacturing a micromecha...

Production method for a micromechanical component

Dual membrane transducer

Ultrasonic transducer, manufacturing method thereof, and ultrasonic...

Semiconductor device and method of manufacturing semiconductor device

Piezoelectric micromachined ultrasonic transducer and method of fab...

CMOS ultrasonic transducers and related apparatus and methods

Support structure for MEMS device with particle filter

Bottom electrode via structures for micromachined ultrasonic transd...

Patents Applicationslast 30 patents

ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...

INTEGRATED PRESSURE DIAPHRAGMS

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING IMPROVED SIGNAL DISTOR...

TOP NOTCH SLIT PROFILE FOR MEMS DEVICE

VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...

ACTIVE MATRIX PROGRAMMABLE MIRROR

SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE

MICROMECHANICAL DIAPHRAGM SYSTEM

INTERPOSER FOR DAMPING MEMS MICROPHONES

MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

MEMS LOUDSPEAKER MANUFACTURING METHOD AND MEMS LOUDSPEAKER

SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE

MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS

Spring Supported and Sealed MEMS Diaphragm Assembly

CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS

SOUND PRODUCING CELL

BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...

PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

LASER SEALING AND SURFACE ASPERITY CONTROLLING METHOD WITH DISCONTI...

MEMS RESONATOR

MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...

MEMBRANE TRANSFER METHOD

LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...

MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD

MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...