Diaphragms

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CPC
B81B2203/0127

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0127Diaphragms

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical system membrane
- Patent number 12,368,997
- Issue date Jul 22, 2025
- AAC Technologies Pte. Ltd.
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compact enhanced sensitivity temperature sensor using an encapsulat...
- Patent number 12,365,580
- Issue date Jul 22, 2025
- King Fahd University of Petroleum & Minerals
- Xuecui Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor or microphone device
- Patent number 12,365,581
- Issue date Jul 22, 2025
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of manufa...
- Patent number 12,350,710
- Issue date Jul 8, 2025
- Vermon S.A.
- Dominique Gross
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating semiconductor structures including cavities...
- Patent number 12,344,524
- Issue date Jul 1, 2025
- Soitec
- Mariam Sadaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,330,932
- Issue date Jun 17, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sealed force sensor with etch stop layer
- Patent number 12,332,127
- Issue date Jun 17, 2025
- NEXTINPUT, INC.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interconnection for monolithically integrated stacked devices and m...
- Patent number 12,330,189
- Issue date Jun 17, 2025
- GLOBALFOUNDRIES SINGAPOREPTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated MEMS electrostatic micro-speaker device and method
- Patent number 12,325,625
- Issue date Jun 10, 2025
- Vibrant Microsystems Inc.
- Steven Nasiri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Coil module for electromagnetic microspeaker, coil module array and...
- Patent number 12,319,561
- Issue date Jun 3, 2025
- OTOWAHR TECHNOLOGY INC.
- Yu Min Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS environmental sensor and preparation method therefor
- Patent number 12,319,565
- Issue date Jun 3, 2025
- MultiDimension Technology Co., Ltd.
- Insik Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor and manufacturing method thereof
- Patent number 12,313,611
- Issue date May 27, 2025
- Electronics and Telecommunications Research Institute
- Seungeon Moon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromagnetic microspeaker, its coil module, speaker/coil module...
- Patent number 12,312,234
- Issue date May 27, 2025
- OTOWAHR TECHNOLOGY INC.
- Yu Min Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device comprising different types of microelectromech...
- Patent number 12,304,807
- Issue date May 20, 2025
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Hsiang-Fu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 12,304,808
- Issue date May 20, 2025
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a combined microelectromechanical device...
- Patent number 12,297,099
- Issue date May 13, 2025
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic acoustic devices, MEMS microphones, and equalization met...
- Patent number 12,297,100
- Issue date May 13, 2025
- Skyworks Solutions, Inc.
- Humberto Campanella-Pineda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 12,297,096
- Issue date May 13, 2025
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 12,297,102
- Issue date May 13, 2025
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device
- Patent number 12,294,832
- Issue date May 6, 2025
- DENSO CORPORATION
- Yuki Ohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual diaphragm dielectric sensor
- Patent number 12,291,445
- Issue date May 6, 2025
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photoacoustic gas sensors with improved signal-to-noise ratio
- Patent number 12,287,280
- Issue date Apr 29, 2025
- Invensense, Inc.
- Jeremy Parker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,281,007
- Issue date Apr 22, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhengyu Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer component, manufacturing method thereof, and transducer
- Patent number 12,281,006
- Issue date Apr 22, 2025
- BOE Technology Group Co., Ltd.
- Yongchun Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant sensor using MEMS resonator, and detection method by reson...
- Patent number 12,275,634
- Issue date Apr 15, 2025
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Kunihiko Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 12,269,061
- Issue date Apr 8, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,269,732
- Issue date Apr 8, 2025
- FORTEMEDIA, INC.
- Jien-Ming Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dielectric protection layer configured to increase performance of m...
- Patent number 12,269,735
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system
- Patent number 12,264,064
- Issue date Apr 1, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 12,263,506
- Issue date Apr 1, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...
- Publication number 20250236507
- Publication date Jul 24, 2025
- XI'AN JIAOTONG UNIVERSITY
- Xudong FANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20250229292
- Publication date Jul 17, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM
- Publication number 20250223154
- Publication date Jul 10, 2025
- AAC TECHNOLOGIES PTE. LTD
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND ELECTRONIC DEVICE
- Publication number 20250220353
- Publication date Jul 3, 2025
- Goertek Microelectronics Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE
- Publication number 20250214832
- Publication date Jul 3, 2025
- Hahn-Schickard-Gesellschaft für angewandte Forschung e.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE HAVING MICROELECTROMECHANICAL SYSTEMS DEVICES...
- Publication number 20250214108
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- I-Hsuan Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOGAP DIELECTRIC MATERIAL
- Publication number 20250206597
- Publication date Jun 26, 2025
- ROBERT BOSCH GmbH
- Mordechai KORNBLUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE
- Publication number 20250206599
- Publication date Jun 26, 2025
- Merry Electronics(Shenzhen) Co., Ltd.
- Yung-Hsiang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS
- Publication number 20250206600
- Publication date Jun 26, 2025
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PATTERNING WITHIN MEMS LAYER
- Publication number 20250197192
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Sarah Nitzan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE
- Publication number 20250187908
- Publication date Jun 12, 2025
- AAC MICROTECH (CHANGZHOU) CO., LTD.
- Yuwei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD
- Publication number 20250194002
- Publication date Jun 12, 2025
- GOERTEK MICROELECTRONICS INC.
- Tangliu Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEALED MICROELECTROMECHANICAL MEMBRANE DEVICE
- Publication number 20250178886
- Publication date Jun 5, 2025
- STMicroelectronics International N.V.
- Mark Andrew SHAW
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CANTILEVER-ENCLOSURE SPACING
- Publication number 20250178884
- Publication date Jun 5, 2025
- Soundskrit Inc.
- Yuhai Mei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS THIN MEMBRANE WITH STRESS STRUCTURE
- Publication number 20250171294
- Publication date May 29, 2025
- STMicroelectronics Pte Ltd
- Ravi Shankar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS transducer having a carrier layer and at least two piezoelectr...
- Publication number 20250171295
- Publication date May 29, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS COMPONENT
- Publication number 20250171297
- Publication date May 29, 2025
- ROBERT BOSCH GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20250162860
- Publication date May 22, 2025
- The University of British Columbia
- Chang Ge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT
- Publication number 20250145450
- Publication date May 8, 2025
- Nisshinbo Micro Devices Inc.
- Yoshimitsu Kuromaru
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
- Publication number 20250145454
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- PO CHEN YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT
- Publication number 20250145449
- Publication date May 8, 2025
- Nisshinbo Micro Devices Inc.
- Takao Fukutome
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE
- Publication number 20250142966
- Publication date May 1, 2025
- AUO Corporation
- Wei Ting Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH AND ELECTRONIC DEVICE
- Publication number 20250136434
- Publication date May 1, 2025
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND...
- Publication number 20250128934
- Publication date Apr 24, 2025
- ROBERT BOSCH GmbH
- Paul Fehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...
- Publication number 20250126415
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME
- Publication number 20250115473
- Publication date Apr 10, 2025
- Advanced Semiconductor Engineering, Inc.
- Hsu-Liang HSIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...
- Publication number 20250109016
- Publication date Apr 3, 2025
- ROBERT BOSCH GmbH
- Richard Fix
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Controller for sound producing device with dynamic vent function
- Publication number 20250100870
- Publication date Mar 27, 2025
- xMEMS Labs, Inc.
- Ming-Hung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
- Publication number 20250100871
- Publication date Mar 27, 2025
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectromechanical system membrane

Compact enhanced sensitivity temperature sensor using an encapsulat...

Micromechanical component for a sensor or microphone device

Capacitive micromachined ultrasonic transducer and method of manufa...

Methods of fabricating semiconductor structures including cavities...

MEMS microphone

Sealed force sensor with etch stop layer

Interconnection for monolithically integrated stacked devices and m...

Integrated MEMS electrostatic micro-speaker device and method

Coil module for electromagnetic microspeaker, coil module array and...

MEMS environmental sensor and preparation method therefor

Gas sensor and manufacturing method thereof

Electromagnetic microspeaker, its coil module, speaker/coil module...

Semiconductor device comprising different types of microelectromech...

Signal processing circuit for triple-membrane MEMS device

Process for manufacturing a combined microelectromechanical device...

Electronic acoustic devices, MEMS microphones, and equalization met...

MEMS transducer

Membrane support for dual backplate transducers

Microelectromechanical systems device

Dual diaphragm dielectric sensor

Photoacoustic gas sensors with improved signal-to-noise ratio

MEMS microphone

Transducer component, manufacturing method thereof, and transducer

Resonant sensor using MEMS resonator, and detection method by reson...

Bottom electrode via structures for micromachined ultrasonic transd...

MEMS microphone

Dielectric protection layer configured to increase performance of m...

Microelectromechanical system

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Patents Applicationslast 30 patents

ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

MICROELECTROMECHANICAL SYSTEM

MEMS MICROPHONE AND ELECTRONIC DEVICE

USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE

SEMICONDUCTOR DEVICE HAVING MICROELECTROMECHANICAL SYSTEMS DEVICES...

NANOGAP DIELECTRIC MATERIAL

ELECTRONIC DEVICE

ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS

ANTI-STICTION PATTERNING WITHIN MEMS LAYER

MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE

VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD

SEALED MICROELECTROMECHANICAL MEMBRANE DEVICE

MEMS CANTILEVER-ENCLOSURE SPACING

MEMS THIN MEMBRANE WITH STRESS STRUCTURE

MEMS transducer having a carrier layer and at least two piezoelectr...

MEMS COMPONENT

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

MEMS ELEMENT

SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME

MEMS ELEMENT

ELECTRONIC DEVICE

MEMS SWITCH AND ELECTRONIC DEVICE

METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND...

MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...

SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME

PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

Controller for sound producing device with dynamic vent function

ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES