Number | Date | Country | Kind |
---|---|---|---|
57-85726 | May 1982 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4419813 | Iwai | Dec 1983 |
Entry |
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Preprints for 29-th Applied Physics Meeting 691 (1982) Ogawa et al. |
K. Kurosawa, T. Shibata and H. Iizuka, "A New Bird's-Beak Free Field Isolation Technology for VLSI Devices" IEDM Techn. Digest, 384-387 (1981). |