Number | Date | Country | Kind |
---|---|---|---|
63-295420 | Nov 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4463491 | Goldman et al. | Aug 1984 | |
4555842 | Levinstein et al. | Dec 1985 | |
4786611 | Pfiester | Nov 1988 |
Number | Date | Country |
---|---|---|
54-000880 | Jun 1979 | JPX |
62-233931 | Sep 1988 | JPX |
2153146 | Aug 1985 | GBX |
Entry |
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Mieno et al., "Selected Doped Polysilicon Growth Effect of Carbon on the Selective Doped Silicon Film Growth," J. Electrochem. Soc. Solid-State Science and Technology, vol. 134, No. 11, Nov. 1987. |