Number | Name | Date | Kind |
---|---|---|---|
3930913 | Jacob | Jan 1976 | |
4092442 | Agnihotri et al. | May 1978 | |
4244799 | Fraser et al. | Jan 1981 | |
4256534 | Levinstein et al. | Mar 1981 |
Entry |
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Bell System Technical Journal, vol. 58, (1979) "High Resolution, Steep Profile, Resist Patterns", pp. 1027-1036, by J. M. Moran and D. Maydan. |