This application is a continuation of application Ser. No. 368,567, filed Apr. 15, 1982, abandoned.
Number | Name | Date | Kind |
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3860783 | Schmidt et al. | Jan 1975 | |
3990927 | Montier | Nov 1976 | |
4214966 | Mahoney | Jul 1980 | |
4292156 | Matsumoto et al. | Sep 1981 | |
4377438 | Moriya et al. | Mar 1983 | |
4385975 | Chu et al. | May 1983 |
Entry |
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Appl. Phys. Lett. 40(7), Apr. 1, 1982, Planarization of Patterned Surfaces by Ion Beam Erosion, L. F. Johnson et al., pp. 636-638. |
IBM Technical Disclosure Bulletin, vol. 21, No. 5, Oct. 1978, Dielectric Isolation Planarization by T. A. Bartush et al., pp. 1868-1869. |
IBM Technical Disclosure Bulletin, vol. 21, No. 5, Oct. 1978, Reestablishing Parallelism after Rie Etching by H. B. Pogge, pp. 1849-1850. |
Number | Date | Country | |
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Parent | 368567 | Apr 1982 |