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Entry |
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“Formation of shallow P-type layers by implantation of molecular diborane ions”; Yokota, K.; Nishimura, H.; Terada, K.; Nakamura, K.; Sakai, S.; Tanjou, M.; Takano, H.; Kumagai, M.; 1998 International Conference on Jun. 22-26, 1998; pp. 9194. |