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Entry |
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Wolf, “Silicon Processing for the VLSI Era”, vol. 3: The Submicron MOSFET, Lattice Press Sunset Beach, CA, (1995), p. 438. |
Wolf, “Silicon Processing for the VLSI Era”, vol. 3: The Submicron MOSFET, Lattice Press Sunset Beach, CA, (1995), pp. 648-661. |