Number | Name | Date | Kind |
---|---|---|---|
4804560 | Shioya et al. | Feb 1989 | |
4902533 | White et al. | Feb 1990 | |
4948755 | Mo | Aug 1990 | |
4981550 | Huttemann et al. | Jan 1991 | |
4990467 | Lee et al. | Feb 1991 | |
5066612 | Ohba et al. | Nov 1991 | |
5084414 | Manley et al. | Jan 1992 |
Number | Date | Country |
---|---|---|
63-44730 | Feb 1988 | JPX |
Entry |
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S. Wolf et al., Silicon Processing for the VLSI Era, vol. 1, Lattice Press, Sunset Beach, Calif., 1986, pp. 429, 452-453. |
S. Wolf, Silicon Processing for the VLSI Era, vol. 2, Lattice Press, Sunset Beach, Calif., 1990. |