Number | Name | Date | Kind |
---|---|---|---|
5228501 | Tepman, et al. | Jul 1993 | |
5292399 | Lee et al. | Mar 1994 | |
5561585 | Barnes, et al. | Oct 1996 | |
5587207 | Gorokhovsky | Dec 1996 |
Entry |
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John L. Vossen and Werner Kern, Thisn Film Processes II, pp. 177-275, 1991. |
Catherine M Cotel et al., ASM Handbook, vol. 5, Surface Engineering, pp. 497-611, 1994. |