Number | Date | Country | Kind |
---|---|---|---|
2723902 | May 1977 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
3742229 | Smith et al. | Jun 1973 | |
3928094 | Angell | Dec 1975 | |
3984680 | Smith | Oct 1976 |
Entry |
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Spears et al., "X-Ray Lithography-A New High Resolution Replication Process", Solid State Technology, Jul. 1972 ,m p. 21-26. |