J. A. Butora and C. J. Owen, Circuit Etching Process, IBM Technical Disclosure Bulletin, vol. 12, No. 9, 2/1970, p. 1515. |
Rivaud et al., "Pulsed-Jet Etch Chamber for Preparing Silicon Samples for Transmission Electron Microscopy", Rev. Sci. Instrum., vol. 56, (1985) 563-566. |
Cheng et al., "Particle Bounce in Cascade Impactors", Environ, Sci. Tech., vol. 13, (1979) 1392-1396. |
Dialog Search Report. |
Chen et al., "Aerosol Jet Etching of Fine Patterns", Appl. Phys. Lett. vol. 51, (1987), 2203-2205. |
Jun-Ru et al., "A New Confirmational Dry-Etch Technique for Submicrometer Structures", J. Vac. Sci. Technol., vol. 19 (1981) 1385-1389. |
Barker et al., "Surface Studies of and a Mass Balance for Ar.sup.+ Ion Assisted Cl.sub.2 Etching of Si", J. Vac. Sci. Technol. B, vol. 1 (1983), 37-42. |
Geis et al., "Hot Jet Etching of GaAs and Si", J. Vac. Sci. Technol. B, vol. 4, (1986), 315-317. |