Number | Date | Country | Kind |
---|---|---|---|
4-196576 | Jun 1992 | JPX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/JP93/00865 | 6/25/1993 | 4/26/1994 | 4/26/1994 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO94/00872 | 1/6/1994 |
Number | Name | Date | Kind |
---|---|---|---|
4151007 | Levinstein et al. | Apr 1979 | |
4154873 | Hickox et al. | May 1979 | |
4192720 | Bucker et al. | Mar 1980 | |
4312681 | Rupprecht et al. | Jan 1982 | |
4431708 | Carver et al. | Feb 1984 | |
4432809 | Chye et al. | Feb 1984 | |
4844719 | Toyomoto et al. | Jul 1989 | |
4888305 | Yawazaki et al. | Dec 1989 | |
5194928 | Cronin et al. | Mar 1993 | |
5210056 | Pong et al. | May 1993 | |
5213670 | Bertasnolli et al. | May 1993 |
Number | Date | Country |
---|---|---|
0131717 | Jan 1985 | EPX |
3142589 | May 1983 | DEX |
221309A1 | Dec 1983 | DEX |
60-249336 | Dec 1985 | JPX |
61-150340 | Jul 1986 | JPX |
4-167433 | Jun 1992 | JPX |
Entry |
---|
Translation of JP 4-16744. |
Translation of JP 60-249336. |
Malbon, R. M., et al., J. Electro Chem. Soc. vol. 133, #9 (1976) 1413. |
Ghandhi, S. K., "VLSI Fab, Principles" J. Wiley & Sons, N.Y. 1983. |
Guha, S. et al, Sol. State Electr, vol. 20 (1977) 27. |