Claims
- 1. A method of chemical vapor deposition in a continuous treatment line for coating the surface of a steel material having a surface by passing it through a chemical vapor deposition treating chamber, comprising blowing a reacting as or a gas containing a reacting gas onto the steel material through blowing nozzles in the chemical vapor deposition treating chamber so as to cause chemical vapor deposition on said surface at a velocity sufficient to forcibly remove products of the reaction caused by said reacting gas from said surface of the steel material, and concurrently carrying out chemical vapor deposition thereon, including blowing the gas onto the steel material from the blowing nozzles at discharging speed V.sub.o of not less than 0.5 m/sec.
- 2. The method as claimed in claim 1, comprising blowing the gas onto the steel material at the flowing speed of not higher than 5 Nm/sec.
- 3. The method as claimed in claim 1 or 2, comprising blowing onto the steel material the gas as a mixed gas of not less than one kind of the following main gases, and not less than one kind of the following auxiliary gases or/and the following carrier gases
- Main gases: AlCl.sub.3, BCl.sub.2, CrCl.sub.2, SiCl.sub.4, Si.sub.2 Cl.sub.6, SiH.sub.4, WCl.sub.2, ZrCl, TiCl.sub.4
- Auxiliary gases: CH.sub.4, H.sub.2, N.sub.2, CO.sub.2, H.sub.2 O
- Carrier gases: N.sub.2, Ar, He.
- 4. The method as claimed in claim 1 or 2, wherein said blowing nozzles include a plurality of blowing nozzles disposed along both sides of a transferring line of the steel material within the chemical vapor deposition treating chamber, and wherein said method comprising blowing the gas onto the running steel strip at both surfaces thereof through the blowing nozzles.
- 5. The method as claimed in claim 1 or 2, comprising blowing the gas from the blowing nozzles onto the steel material as a non-continuous steel material transferred by means of a transferring means.
- 6. The method as claimed in claim 1 or 2, comprising including SiCl.sub.4 in the reacting gas which is blown onto the steel material so as to form a coating of Si thereon.
- 7. The method as claimed in claim 1 or 2, wherein said blowing nozzles include a plurality of blowing nozzles disposed along both sides of a transferring line of the steel material within the chemical vapor deposition treating chamber, and including SiCl.sub.4 in the reaction gas which is blown onto the steel material at both surfaces thereof through the blowing nozzles, and carrying out a diffusion heating treatment on the steel material so as to diffuse Si thus deposited on the steel surfaces into the interior of the steel.
Parent Case Info
This application is a continuation-in-part of application Ser. No. 07/247,741 filed Sep. 22, 1988, now abandoned.
US Referenced Citations (3)
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
247741 |
Sep 1988 |
|