Number | Date | Country | Kind |
---|---|---|---|
6-257032 | Oct 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4116714 | Basi | Sep 1978 | |
4156619 | Griesshammer | May 1979 | |
5181985 | Lampert et al. | Jan 1993 | |
5317778 | Kudo et al. | Jun 1994 | |
5442828 | Lutz | Aug 1995 | |
5547515 | Kudo et al. | Aug 1996 |
Number | Date | Country |
---|---|---|
0526245A1 | Feb 1993 | EPX |
03228328 | Oct 1991 | JPX |
04113620 | Apr 1992 | JPX |
05021412 | Jan 1993 | JPX |
06314679 | Nov 1994 | JPX |
07014817 | Jan 1995 | JPX |
Entry |
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Patent Abstracts of Japan, vol. 12 No. 49, Feb. 13, 1988; & JP-A-62 198127 (Sanyo Electric) Sep. 1, 1987. |
Patent Abstracts of Japan, vol. 18, No. 403, Jul. 27, 1994; & JP-A-06 120192 (Sumitomo) Apr. 28, 1994. |
International Conference of Solid State Devices and Materials, Aug. 26-28, 1992, Tokyo, Japan, pp. 193-195, Isagawa et al. "Ultra Clean Surface Preparation Using Ozonized Ultrapure Water". |