Wolf, Stanley, Silicon Processing for the VLSI Era, vol. 2, pp. 198-199, 1990. |
Lee, Hong H., Fundamentals of microelectronics processing, pp. 394-395, 420-424, 449, 1990. |
S. Wolf et al. Silicon Processing for the VLSI Era. vol. 1, p. 164, 514, 1986. |
S. Wolf et al. Silicon Processing for the VLSI Era, vol. 2, p. 226, 238-239, 1990. |
M.K. Jain et al. "Chemical Mechanical Planarization of Multilayer Dielectric Stacks", SPIE: Microelectronics Technology and Process Integration, Oct. 20-21, 1994, Austin, Texas, pp. 2-1, XP002019336. |
"SI Precoat of PECVD Chamber Walls Prior to the Formation of a Thin SI Layer on Gas or III-V Compounds", Research Disclosure, No. 325, May 1, 1991, p. 367 XP000229723. |