Claims
- 1. A method of fabricating a diffraction grating by utilizing a single substrate, said method comprising the steps of:forming a photosensitive material layer and a light transmission reducing film having a predetermined pattern integrally with the substrate, said predetermined pattern corresponding to a pattern of a diffraction grating to be fabricated; exposing the photosensitive material layer by exposure irradiation light via the light transmission reducing film; and developing the photosensitive material layer after exposure, thereby forming the diffraction grating.
- 2. A method of fabricating a diffraction grating according to claim 1, wherein the photosensitive material layer is provided on one side of the substrate and the light transmission reducing film is provided on the other side of the substrate.
- 3. A method of fabricating a diffraction grating according to claim 1, wherein the photosensitive material layer and the light transmission reducing film are provided on the same side of the substrate.
- 4. A method of fabricating a diffraction grating according to claim 1, wherein a reflection preventing layer is provided outside the photosensitive material layer.
- 5. A method of fabricating a diffraction grating according to claim 1, further comprising the steps of:plating a surface of the photosensitive material layer with metal to form a metallic stamper after development; and fabricating a diffraction grating by utilizing said stamper.
- 6. A method of fabricating a diffraction grating according to claim 1, further comprising the steps of:pouring resin onto a surface of the photosensitive material layer after development; curing the poured resin; and removing the cured resin.
Priority Claims (1)
Number |
Date |
Country |
Kind |
10-248646 |
Sep 1998 |
JP |
|
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is based upon and claims priority of Japanese Patent Application No. 10-248646, filed Sep. 2, 1998, the contents being incorporated therein by reference, and a continuation of PCT/JP99/03736 filed Jul. 9, 1999.
US Referenced Citations (4)
Number |
Name |
Date |
Kind |
4948706 |
Sugihara et al. |
Aug 1990 |
A |
5712065 |
Chiang |
Jan 1998 |
A |
5786116 |
Rolfson |
Jul 1998 |
A |
6306562 |
Ikeda et al. |
Oct 2001 |
B1 |
Foreign Referenced Citations (4)
Number |
Date |
Country |
60-33504 |
Feb 1985 |
JP |
6-201909 |
Jul 1994 |
JP |
8-334610 |
Dec 1996 |
JP |
10-106047 |
Apr 1998 |
JP |
Continuations (1)
|
Number |
Date |
Country |
Parent |
PCT/JP99/03736 |
Jul 1999 |
US |
Child |
09/795442 |
|
US |