Number | Date | Country | Kind |
---|---|---|---|
6-316130 | Dec 1994 | JPX | |
7-001220 | Jan 1995 | JPX | |
7-079989 | Apr 1995 | JPX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/JP95/02583 | 12/15/1995 | 6/20/1997 | 6/20/1997 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO96/19800 | 6/27/1996 |
Number | Name | Date | Kind |
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3811856 | Ruszczyk et al. | May 1974 | |
5445710 | Hori et al. | Aug 1995 | |
5607599 | Ichihara et al. | Mar 1997 |
Number | Date | Country |
---|---|---|
56-74862 | Jun 1981 | JPX |
61-120326 | Jun 1986 | JPX |
61-123141 | Jun 1986 | JPX |
4-56785 | Feb 1992 | JPX |
4-129014 | Apr 1992 | JPX |
4-132011 | May 1992 | JPX |
5-6876 | Jan 1993 | JPX |
5-136100 | Jun 1993 | JPX |
6-236860 | Aug 1994 | JPX |
60-205879 | Oct 1995 | JPX |
Entry |
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The Institute of Electrical Engineers of Japan--DPS 1995--Proceedings of Symposium on Dry Process--Nov. 1-3, 1995. |
Electron-Ion Beam Handbook--2nd. Edition. |