Number | Date | Country | Kind |
---|---|---|---|
2000-402693 | Dec 2000 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5795801 | Lee | Aug 1998 | A |
6090684 | Ishitsuka et al. | Jul 2000 | A |
Number | Date | Country |
---|---|---|
11-40662 | Feb 1999 | JP |
2000-150878 | May 2000 | JP |
Entry |
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Ryssel and Ruge, “Ion Implantation”, Chapter 3, paragraph 3.9.1, p 95, John Wiley, 1986. |