Robert E. Mihailovich, Z. L. Zhang, K. A. Shaw, and Noel C. MacDonald, “Single-Crystal Silicon Torsional Resonators.” School of Electrical Engineering, Cornell University, Ithaca, NY 14853, pp. 184-188, IEEE (Feb. 1993). |
M.T.A. Salf and N. C. MacDonald, “Planarity of Large MEMS,” Journal of Microelectromechanical Systems, 5, 79-97 (1996). |
W.-H. Juan and S.W. Pang, “High-aspect-ratio Si Vertical Micromirror Arrays for Optical Switching,” Journal of MicroElectroMechanical Systems, 7, 207, -213 (1998). |
Rob Legtenberg, et al., “Comb-drive actuators for large displacements,” Journal of Micromechaniss and Microengineering, vol. 6, No. 2, pp. 320-329, Jun. 1996. |
Chris S.B. Lee, Sejin Han, and Noel C. MacDonald, “Single Crystal Silicon (SCS) XY-Stage Fabricated by DRIE and IR alignment,” MEMS 2000: The Thirteenth Annual International Conference on Micro Electro Mechanical Systems, pp. 28-33 (Jan. 23-27, 2000). |
Chris S.B. Lee, Russell Y. Webb, John M. Chong, and Noel C. MacDonald, “Single Crystal Silicon (SCS) MircroMIrror Arrays using Deep Silicon Etching and IR Alignment,” MEMS 2000: The Thirteenth Annual International Conference on Micro Electro Mechanical Systems, pp. 441-448 (Jan. 23-27, 2000). |
David A. Koester, Ramaswamy Mahadevan, Alex Shishkoff, and Karen W. Markus, “MUMPs Design Handbook,” Version 4.0, Cronos Integrated Microsystems, Research Triangle Park, NC 27709, pp. 1-37 (May 1999). |
Russell Y. Webb, Scott G. Adams, and Noel C. MacDonald, “Suspended Thermal Oxide Trench Isolation for SCS MEMS.” SPIE vol. 3519, Boston, MA, pp. 196-199 (Nov. 1998). |
Seung Chris B. Lee, “Two-Depth, Single Crystal Silicon Microelectromechanical Systems.” A Dissertation Presented to the Faculty of the Graduate School of Cornell University in Partial Fulfillment of the Requirements for the Degree of Doctor of Philosophy, (Jan. 2000). |
Leslie A. Field, Diane L. Burriesci, Peter R. Robrish, and Richard C. Ruby, “Micromachined 1 ×2 Optical-Fiber Switch,” Sensors and Actuators A, 53, pp. 311-315, (1996). |
Larry J. Hornbeck, “Digital Light Proecssing for High-Brightness, High-Resolution Applications,” SPIE vol. 3013, San Jose, CA, pp. 27-40 (Feb. 1997). |
Noel C. MacDonald, “SCREAM MicroElectroMechanical Systems.” Microelectronic Engineering, 32, pp. 49-73 (1996). |
Ming C. Wu, “MEMS for Optical and RF Applications.” UCLA Extension, Department of Engineering, Information Systems and Technical Management, Engineering: 823.52, Nov. 1-3, 1999. |
Wolfgang Hofmann, Chris S. Lee, and Noel C. MacDonald, Monolithic Three-Dimensional Single-Crystal Sllicon Microelectromechanical Systems, Sensors and Materials, vol. 10, No. 6, pp. 337-350 (1998). |
William C. Tang, Martin G. Lim, and Roger T. Howe, “Electrostatic Comb Drive Levitation and Control Method” Journal of Microelectromechanical Systems, vol. 1, No. 4, pp. 170-178 (Dec. 1992). |
M.C. Wu, L.-Y Lin, S.-S. Lee, and K.S.J. Pister, “Micromachined Free-Space Integrated Micro-Optics,” Sensors and Actuators A, 50, pp. 127-134 (1995). |
Joseph E. Ford, Vladimir A. Aksyuk, David J. Bishop, and James A. Walker, “Wavelength Add-Drop Switching Using Tilting Micromirrors,” Journal of Lightwave Technology, vol. 17, No. 5, pp. 904-911 (May 1999). |
Cornel Marxer and Nicolaas F. de Rooij, “Micro-Opto-Mechanical 2 ×2 Switch for Single-Mode Fibers Based on Plasma-Etched Silicon Mirror and Electrostatic Actuation,” Journal of Lightwave Technology, vol. 17, No. 1, pp. 2-6 (Jan. 1999). |
Timothy J. Broshnihan, James M. Bustillo, Albert P. Pisano & Roger T. Howe, “Embedded Interconnect & Electrical Isolation for High-Aspect-Ratio, SOI Inertial Instruments,” Berkeley Sensor & Actuator Sensor, pp. 637-640, Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators (Chicago, Jun. 16-19, 1997). |
Janusz Bryzek, Kurt Petersen, & Wendell McCulley, “Micromachines on the March,” IEEE Spectrum, pp. 20-31 (May 1994). |
Wolfgang Kuehnel and Steven Sherman, “A Surface Micromachined Silicon Acclerometer with On-Chip Detection Circuitry,” Sensors and Actuators A 45, pp. 7-16 (1994). |
Lynn Michelle Roylance and James B. Angell, “A Batch-Fabricated Silicon Accelerometer,” IEEE Transactions on Electron Devices, vol. Ed-26, No. 12, pp. 1911-1917 (Dec. 1979). |
Kevin A. Shaw, et al., “SCREAM I: A Single Mask, Single-Crystal Silicon, Reactive Ion Etching Process for Microelectromechanical Structures,” Sensors and Actuators A, 40 pp. 63-70 (1994). |
Toshiki Hirano, et al., “Design, Fabrication, and Operation of Submicron Gap Comb-Drive Microactuators,” J. of Microelectromechanical Systems, vol. 1, No. 1, pp. 52-59, (Mar. 1992). |
V.P. Jaecklin. et al., “Comb Actuators for XY-Microstages,” Sensors and Actuators, A, 39, pp. 83-89 (1993). |
Susanne C. Arney and Noel C. MacDonald, et al., “Formation of Submicron Silicon-On-Insulator Sructures by Lateral Oxidation of Substrate-Slicon Islands,” J. Vac. Sci. Technol. B vol. 6 No. 1, pp. 341-345, (Jan./Feb. 1988). |
“Lucent's New All-Optical Router Uses Bell Labs Microscopic Mirrors,” Bells Labs press release, pp. 1-4, Nov. 10, 1999. http://www.bell-labs.com/news/1999/november/10/1.html. |
M. Adrian Michalicek, Wenge Zhang, Kevin F. Harsh, Victor M. Bright, and Y.C. Lee, “Micromirror Arrays Fabricated by Flip-Chip Assembly,” Part of the SPIE Conference on Miniaturizes Systems with Micro-Optics and MEMs, Santa Clara, SPIE vol. 3878, pp. 68-79 (Sep. 1999). |
Chris Seung-Bok Lee, Sejin Han, Noel C. MacDonald, “Mulitple Depth, Single Crystal Silicon MicroActuators for Large Displacement Fabricated by Deep Reactive Ion Etching,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 45-50 (Jun. 8-11, 1998). |