Forming high aspect ratio structures having deep steep walls

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B81C1/00619

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00619Forming high aspect ratio structures having deep steep walls

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Etching method
- Patent number 12,020,942
- Issue date Jun 25, 2024
- ULVAC, Inc.
- Taichi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for fabricating photonic device elements
- Patent number 11,881,408
- Issue date Jan 23, 2024
- Paul Scherrer Institut
- Lucia Romano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microscale metallic CNT templated devices and related methods
- Patent number 11,542,156
- Issue date Jan 3, 2023
- CNT Holdings, LLC
- Robert C. Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 11,524,893
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor, method for manufacturing inertial sensor, inertial...
- Patent number 11,448,506
- Issue date Sep 20, 2022
- Seiko Epson Corporation
- Koichiro Komizo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,174,160
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity mems and related structures, methods of manufacture a...
- Patent number 11,111,138
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,111,139
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,104,572
- Issue date Aug 31, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,021,364
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Narrow gap device with parallel releasing structure
- Patent number 11,018,218
- Issue date May 25, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Narrow gap device with parallel releasing structure
- Patent number 11,011,601
- Issue date May 18, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component especially for horology with surface topology and method...
- Patent number 10,981,783
- Issue date Apr 20, 2021
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating semiconductor structure
- Patent number 10,964,547
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor, method for manufacturing inertial sensor, inertial...
- Patent number 10,955,242
- Issue date Mar 23, 2021
- Seiko Epson Corporation
- Koichiro Komizo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and manufacturing method for making same
- Patent number 10,947,110
- Issue date Mar 16, 2021
- AAC Technologies Pte. Ltd.
- Lieng Loo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,906,803
- Issue date Feb 2, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microscale metallic CNT templated devices and related methods
- Patent number 10,899,609
- Issue date Jan 26, 2021
- CNT Holdings, LLC
- Robert C. Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 10,807,863
- Issue date Oct 20, 2020
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,766,765
- Issue date Sep 8, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microscale metallic CNT templated devices and related methods
- Patent number 10,745,272
- Issue date Aug 18, 2020
- Brigham Young University
- Robert C. Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,640,364
- Issue date May 5, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,640,365
- Issue date May 5, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,618,802
- Issue date Apr 14, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,618,803
- Issue date Apr 14, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,584,026
- Issue date Mar 10, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating semiconductor structure
- Patent number 10,529,578
- Issue date Jan 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple silicon trenches forming method for MEMS sealing cap wafer...
- Patent number 10,513,431
- Issue date Dec 24, 2019
- Hangzhou Silan Integrated Circuit Co., Ltd.
- Yongxiang Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD
- Publication number 20240304453
- Publication date Sep 12, 2024
- Ulvac, Inc.
- Taichi SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
- Publication number 20240182298
- Publication date Jun 6, 2024
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFA...
- Publication number 20210403320
- Publication date Dec 30, 2021
- Hamamatsu Photonics K.K.
- Nao INOUE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor, Method For Manufacturing Inertial Sensor, Inertial...
- Publication number 20210164781
- Publication date Jun 3, 2021
- SEIKO EPSON CORPORATION
- Koichiro KOMIZO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20210147223
- Publication date May 20, 2021
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Roman Forke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER
- Publication number 20210002131
- Publication date Jan 7, 2021
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE
- Publication number 20200098583
- Publication date Mar 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPONENT ESPECIALLY FOR HOROLOGY WITH SURFACE TOPOLOGY AND METHOD...
- Publication number 20200048081
- Publication date Feb 13, 2020
- Nivarox-Far S.A.
- Alex GANDELHMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS microphone and manufacturing method for making same
- Publication number 20200048080
- Publication date Feb 13, 2020
- AAC Technologies Pte. Ltd.
- Lieng Loo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200024127
- Publication date Jan 23, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017355
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017356
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190315619
- Publication date Oct 17, 2019
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190248644
- Publication date Aug 15, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190233277
- Publication date Aug 1, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190169017
- Publication date Jun 6, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190152767
- Publication date May 23, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR, METHOD FOR MANUFACTURING INERTIAL SENSOR, INERTIAL...
- Publication number 20190154446
- Publication date May 23, 2019
- SEIKO EPSON CORPORATION
- Koichiro KOMIZO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIPLE SILICON TRENCHES FORMING METHOD FOR MEMS SEALING CAP WAFER...
- Publication number 20180362339
- Publication date Dec 20, 2018
- HANGZHOU SILAN INTEGRATED CIRCUIT CO., LTD
- Yongxiang Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR RECESS ETCHING IN MICROMECHANICAL DEVICES
- Publication number 20180346326
- Publication date Dec 6, 2018
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180346318
- Publication date Dec 6, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180257931
- Publication date Sep 13, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE, MICROPHONE AND METHOD FOR PRODUCING A SEMICON...
- Publication number 20180170745
- Publication date Jun 21, 2018
- INFINEON TECHNOLOGIES AG
- Stefan Barzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCALE METALLIC CNT TEMPLATED DEVICES AND RELATED METHODS
- Publication number 20180079642
- Publication date Mar 22, 2018
- Brigham Young University
- Robert C. Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072568
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072566
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180072567
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Material Structure and Method for Deep Silicon Carbide Etching
- Publication number 20180065844
- Publication date Mar 8, 2018
- The Government of the United States of America, as represented by the Secreta...
- Eugene A. IMHOFF
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180057357
- Publication date Mar 1, 2018
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Forming high aspect ratio structures having deep steep walls

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Etching method

System and method for fabricating photonic device elements

Microscale metallic CNT templated devices and related methods

Method for manufacturing micromechanical structures in a device wafer

Inertial sensor, method for manufacturing inertial sensor, inertial...

Fence structure to prevent stiction in a MEMS motion sensor

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity mems and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Narrow gap device with parallel releasing structure

Narrow gap device with parallel releasing structure

Component especially for horology with surface topology and method...

Method of fabricating semiconductor structure

Inertial sensor, method for manufacturing inertial sensor, inertial...

MEMS microphone and manufacturing method for making same

Planar cavity MEMS and related structures, methods of manufacture a...

Microscale metallic CNT templated devices and related methods

Method for manufacturing micromechanical structures in a device wafer

Planar cavity MEMS and related structures, methods of manufacture a...

Microscale metallic CNT templated devices and related methods

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Fence structure to prevent stiction in a MEMS motion sensor

Method of fabricating semiconductor structure

Multiple silicon trenches forming method for MEMS sealing cap wafer...

Patents Applicationslast 30 patents

ETCHING METHOD

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT

METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFA...

Inertial Sensor, Method For Manufacturing Inertial Sensor, Inertial...

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE

COMPONENT ESPECIALLY FOR HOROLOGY WITH SURFACE TOPOLOGY AND METHOD...

MEMS microphone and manufacturing method for making same

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

INERTIAL SENSOR, METHOD FOR MANUFACTURING INERTIAL SENSOR, INERTIAL...

MULTIPLE SILICON TRENCHES FORMING METHOD FOR MEMS SEALING CAP WAFER...

METHOD FOR RECESS ETCHING IN MICROMECHANICAL DEVICES

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

SEMICONDUCTOR DEVICE, MICROPHONE AND METHOD FOR PRODUCING A SEMICON...

MICROSCALE METALLIC CNT TEMPLATED DEVICES AND RELATED METHODS

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

Material Structure and Method for Deep Silicon Carbide Etching

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...